Effects of Process‐Induced Damage on Metal Oxide Semiconductor Structures with 115 Å Thin Gate Oxides

1992 ◽  
Vol 139 (7) ◽  
pp. 2026-2032 ◽  
Author(s):  
S. Kar ◽  
A. Pandey ◽  
A. Raychaudhuri ◽  
S. Ashok
Keyword(s):  
Metal Oxide ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Gate Oxides ◽  
Semiconductor Structures

Interface/border trap characterization of Al2O3/AlN/GaN metal-oxide-semiconductor structures with an AlN interfacial layer

2015 ◽  
Vol 106 (5) ◽  
pp. 051605 ◽  
Author(s):  
Shenghou Liu ◽  
Shu Yang ◽  
Zhikai Tang ◽  
Qimeng Jiang ◽  
Cheng Liu ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Interfacial Layer ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Semiconductor Structures

Trap states in AlGaN/GaN metal-oxide-semiconductor structures with Al2O3 prepared by atomic layer deposition

2010 ◽  
Vol 107 (10) ◽  
pp. 106104 ◽  
Author(s):  
D. Gregušová ◽  
R. Stoklas ◽  
Ch. Mizue ◽  
Y. Hori ◽  
J. Novák ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Metal Oxide ◽  
Atomic Layer ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Trap States ◽  
Semiconductor Structures ◽  
Layer Deposition

scholarly journals Perovskite Metal–Oxide–Semiconductor Structures for Interface Characterization

2021 ◽  
pp. 2101004
Author(s):  
José M. V. Cunha ◽  
M. Alexandra Barreiros ◽  
Marco A. Curado ◽  
Tomás S. Lopes ◽  
Kevin Oliveira ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Interface Characterization ◽  
Semiconductor Structures
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