Film Growth Kinetics of Chemical Vapor Deposition of Copper from Cu (  HFA  ) 2

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pp. 3267-3272 ◽  
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Robert H. Wentorf ◽  
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scholarly journals Study of deposition parameters and growth kinetics of ZnO deposited by aerosol assisted chemical vapor deposition

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Ting-Chen Hsu ◽  
Louis H. Breaux ◽  
Rong Z. Qian ◽  
Sanjay K. Banerjee ◽  
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Chemical Vapor Deposition ◽  
Growth Kinetics ◽  
Vapor Deposition ◽  
Low Temperatures ◽  
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pp. 072102 ◽  
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C. Wu ◽  
D. Y. Guo ◽  
L. Y. Zhang ◽  
P. G. Li ◽  
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