Effective Work Function Modulation by As Implantation in Metal Gate Stacks.

2019 ◽  
Vol 2 (1) ◽  
pp. 49-60
Author(s):  
Rosa María Luna-Sánchez ◽  
Ignacio González-Martínez
Keyword(s):  
Work Function ◽  
Gate Stacks ◽  
Metal Gate ◽  
Effective Work ◽  
Effective Work Function

The effects of process condition of top-TiN and TaN thickness on the effective work function of MOSCAP with high-k/metal gate stacks

2014 ◽  
Vol 35 (10) ◽  
pp. 106002 ◽  
Author(s):  
Xueli Ma ◽  
Hong Yang ◽  
Wenwu Wang ◽  
Huaxiang Yin ◽  
Huilong Zhu ◽  
...  
Keyword(s):  
Work Function ◽  
Process Condition ◽  
Gate Stacks ◽  
Metal Gate ◽  
Effective Work ◽  
Effective Work Function ◽  
High K

scholarly journals Lanthanoid Implantation for Effective Work Function Control in NMOS High-κ∕Metal Gate Stacks

2011 ◽  
Author(s):  
A. Fet ◽  
V. Häublein ◽  
A. J. Bauer ◽  
H. Ryssel ◽  
L. Frey ◽  
...  
Keyword(s):  
Work Function ◽  
Gate Stacks ◽  
Metal Gate ◽  
Effective Work ◽  
Effective Work Function

Origins of Effective Work Function Roll-Off Behavior for High-κ Last Replacement Metal Gate Stacks

2013 ◽  
Vol 34 (6) ◽  
pp. 729-731 ◽  
Author(s):  
Takashi Ando ◽  
Eduard A. Cartier ◽  
John Bruley ◽  
Kisik Choi ◽  
Vijay Narayanan
Keyword(s):  
Work Function ◽  
Gate Stacks ◽  
Metal Gate ◽  
Effective Work ◽  
Effective Work Function

Effective Work-Function Modulation by Aluminum-Ion Implantation for Metal-Gate Technology $(\hbox{Poly-Si/TiN/SiO}_{2})$

2007 ◽  
Vol 28 (12) ◽  
pp. 1089-1091 ◽  
Author(s):  
R. Singanamalla ◽  
H. Y. Yu ◽  
B. Van Daele ◽  
S. Kubicek ◽  
K. De Meyer
Keyword(s):  
Ion Implantation ◽  
Work Function ◽  
Metal Gate ◽  
Effective Work ◽  
Effective Work Function ◽  
Aluminum Ion

Investigating doping effects on high-κ metal gate stack for effective work function engineering

2013 ◽  
Vol 88 ◽  
pp. 21-26 ◽  
Author(s):  
C. Leroux ◽  
S. Baudot ◽  
M. Charbonnier ◽  
A. Van Der Geest ◽  
P. Caubet ◽  
...  
Keyword(s):  
Work Function ◽  
Metal Gate ◽  
Gate Stack ◽  
Effective Work ◽  
Effective Work Function ◽  
Doping Effects

Impact of chemical bonding difference of ALD Mo on SiO2 and Al2O3 on the effective work function of the two gate stacks

2021 ◽  
Vol 39 (4) ◽  
pp. 043201
Author(s):  
Ekaterina Zoubenko ◽  
Sara Iacopetti ◽  
Kamira Weinfeld ◽  
Yaron Kauffmann ◽  
Patrick Van Cleemput ◽  
...  
Keyword(s):  
Work Function ◽  
Chemical Bonding ◽  
Gate Stacks ◽  
Effective Work ◽  
Effective Work Function
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