Ultrahigh Purification of Silane for Semiconductor Silicon

1975 ◽  
Vol 122 (12) ◽  
pp. 1700-1705 ◽  
Author(s):  
A. Yusa ◽  
Y. Yatsurugi ◽  
T. Takaishi
2005 ◽  
Vol 279 (3-4) ◽  
pp. 258-271 ◽  
Author(s):  
Thomas A. Frewen ◽  
Sumeet S. Kapur ◽  
Walter Haeckl ◽  
Wilfried von Ammon ◽  
Talid Sinno

1986 ◽  
Vol 14 (1) ◽  
pp. 61-70 ◽  
Author(s):  
A. Praet ◽  
G. Vercruysse ◽  
W.P. Gomes ◽  
W.M.R. Divigalpitiya ◽  
S. Roy Morrison

2018 ◽  
Vol 25 (5) ◽  
pp. 395-401
Author(s):  
Hye Won Yun ◽  
Doyeon Kim ◽  
Do Hyung Han ◽  
Dong Wan Kim ◽  
Woo-Byoung Kim

2004 ◽  
Vol 151 (12) ◽  
pp. G866 ◽  
Author(s):  
E. Leoni ◽  
L. Martinelli ◽  
S. Binetti ◽  
G. Borionetti ◽  
S. Pizzini

1982 ◽  
Vol 37 (5) ◽  
pp. 1219-1221
Author(s):  
N. K. Rudnevskii ◽  
D. E. Maksimov ◽  
A. N. Tumanova ◽  
T. M. Shabanova

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