A Model for Dopant Incorporation into Growing Silicon Epitaxial Films: II . Comparison of Theory and Experiment
1979 ◽
Vol 126
(4)
◽
pp. 653-660
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1979 ◽
Vol 126
(4)
◽
pp. 644-652
◽
1978 ◽
Vol 25
(11)
◽
pp. 1358-1358
1992 ◽
Vol 50
(1)
◽
pp. 6-7
1990 ◽
Vol 48
(4)
◽
pp. 2-3
Keyword(s):
1978 ◽
Vol 39
(12)
◽
pp. 1355-1363
◽
Keyword(s):
Keyword(s):