Auger Electron Spectroscopy Study of GaAs Substrate Cleaning Procedures

1982 ◽  
Vol 129 (2) ◽  
pp. 406-408 ◽  
Author(s):  
J. L. Zilko ◽  
R. S. Williams
Keyword(s):  
Auger Electron Spectroscopy ◽  
Electron Spectroscopy ◽  
Gaas Substrate ◽  
Auger Electron ◽  
Spectroscopy Study ◽  
Cleaning Procedures ◽  
Substrate Cleaning

Auger electron spectroscopy study of pulsed-laser evaporated CdTe films on (100) GaAs

1987 ◽  
Vol 65 (8) ◽  
pp. 972-974 ◽  
Author(s):  
J. J. Dubowski ◽  
D. F. Mitchell ◽  
G. I. Sproule
Keyword(s):  
Chemical Composition ◽  
Auger Electron Spectroscopy ◽  
Electron Spectroscopy ◽  
Gaas Substrate ◽  
Auger Electron ◽  
Pulsed Laser ◽  
Growth Surface ◽  
Spectroscopy Study ◽  
Gaas Substrates ◽  
Cdte Films

Pulsed-laser evaporated CdTe films deposited on (100) GaAs substrates have been studied by Auger electron spectroscopy (AES). The depth dependence of chemical composition has been determined from sputtering profiles. The films had a constant chemical composition within the accuracy of AES. Thermal treatment of GaAs substrate at temperatures as low as 260 °C was found to be sufficient for obtaining and O- and C-free post-growth surface of GaAs. The width of the interfacial CdTe–GaAs region was ≤ 3 nm, and the interface was Te-rich. A possibility of forming the As2Te3 layer at the CdTe–GaAs interface has been demonstrated.

Auger electron spectroscopy study of Ni3Si

1989 ◽  
Vol 23 (11) ◽  
pp. 1969-1973 ◽  
Author(s):  
I. Baker ◽  
R.A. Padgett ◽  
E.M. Schulson
Keyword(s):  
Auger Electron Spectroscopy ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Spectroscopy Study

Auger electron spectroscopy study of reactive ion etched silicon carbide

2006 ◽  
Vol 83 (1) ◽  
pp. 12-16 ◽  
Author(s):  
J.H. Xia ◽  
Rusli ◽  
S.F. Choy ◽  
R. Gopalakrishan ◽  
C.C. Tin ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Auger Electron Spectroscopy ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Spectroscopy Study ◽  
Etched Silicon

Auger electron spectroscopy study of the epitaxial growth mode of (Ca, Sr)F2 on GaAs(100)

1986 ◽  
Vol 168 (1-3) ◽  
pp. 681-687 ◽  
Author(s):  
C. Fontaine ◽  
J.L. Castano ◽  
J. Castagné ◽  
A. Munoz-Yague
Keyword(s):  
Auger Electron Spectroscopy ◽  
Epitaxial Growth ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Growth Mode ◽  
Spectroscopy Study

Auger Electron Spectroscopy Study of the Chemisorption of Iodine on Zirconium

1980 ◽  
Vol 127 (12) ◽  
pp. 2738-2742 ◽  
Author(s):  
Gopala N. Krishnan ◽  
Bernard J. Wood ◽  
Daniel Cubicciotti
Keyword(s):  
Auger Electron Spectroscopy ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Spectroscopy Study
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