High Resolution Etching of Semiconductors by the Feedback Mode of the Scanning Electrochemical Microscope

1990 ◽  
Vol 137 (8) ◽  
pp. 2468-2472 ◽  
Author(s):  
Daniel Mandler ◽  
Allen J. Bard
2017 ◽  
Vol 85 (6) ◽  
pp. 319-326 ◽  
Author(s):  
Ryo MATSUOKA ◽  
Shigeo AOYAGI ◽  
Naoshi MATSUMOTO ◽  
Masaaki MATSUDAIRA ◽  
Yasufumi TAKAHASHI ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document