High Resolution Etching of Semiconductors by the Feedback Mode of the Scanning Electrochemical Microscope
1990 ◽
Vol 137
(8)
◽
pp. 2468-2472
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1990 ◽
Vol 137
(4)
◽
pp. 1079-1086
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1996 ◽
Vol 92
(20)
◽
pp. 3799
◽
1988 ◽
Vol 6
(6)
◽
pp. 1873
◽
2011 ◽
Vol 56
(28)
◽
pp. 10701-10707
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Keyword(s):
Keyword(s):
1989 ◽
Vol 136
(3)
◽
pp. 885-886
◽
1989 ◽
Vol 136
(10)
◽
pp. 3143-3144
◽
2004 ◽
Vol 108
(20)
◽
pp. 6391-6397
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