Scanning Electrochemical Microscopy: The Application of the Feedback Mode for High Resolution Copper Etching
1989 ◽
Vol 136
(10)
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pp. 3143-3144
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2004 ◽
Vol 6
(3)
◽
pp. 288-293
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2012 ◽
Vol 134
(24)
◽
pp. 9856-9859
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