Micro/Macrocavity Method Applied to the Study of the Step Coverage Formation Mechanism of SiO2 Films by LPCVD

1990 ◽  
Vol 137 (4) ◽  
pp. 1222-1227 ◽  
Author(s):  
Kazunori Watanabe ◽  
Hiroshi Komiyama
Keyword(s):  
Formation Mechanism ◽  
Sio2 Films ◽  
Step Coverage

The Formation Mechanism and Step Coverage Quality of Tetraethylorthosilicate ‐ SiO2 Films Studied by the Micro/Macrocavity Method

1993 ◽  
Vol 140 (10) ◽  
pp. 2952-2959 ◽  
Author(s):  
Tetsuji Sorita ◽  
Satoru Shiga ◽  
Kazuyuki Ikuta ◽  
Yasuyuki Egashira ◽  
Hiroshi Komiyama
Keyword(s):  
Formation Mechanism ◽  
Sio2 Films ◽  
Step Coverage ◽  
Coverage Quality

scholarly journals MECHANISM OF STEP COVERAGE FORMATION OF SiO2 FILMS FROM TEOS AND EFFECTS OF GAS PHASE ADDITIVES STUDIED BY MICRO/MACROCAVITY METHOD

1991 ◽  
Vol 02 (C2) ◽  
pp. C2-55-C2-61
Author(s):  
Y. EGASHIRA ◽  
T. SORITA ◽  
S. SHIGA ◽  
K. IKUTA ◽  
H. KOMIYAMA
Keyword(s):  
Gas Phase ◽  
Sio2 Films ◽  
Step Coverage

X-ray photoelectron spectroscopy insights on interfaces between SiO2 films and GaN substrates: differences due to depositional technique

2020 ◽  
Vol 59 (9) ◽  
pp. 090902
Author(s):  
Noritake Isomura ◽  
Narumasa Soejima ◽  
Tomohiko Mori ◽  
Satoshi Ikeda ◽  
Atsushi Watanabe ◽  
...  
Keyword(s):  
Photoelectron Spectroscopy ◽  
Sio2 Films ◽  
X Ray
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