Diamond Film Preparation by Arc Discharge Plasma Jet Chemical Vapor Deposition in the Methane Atmosphere

Naoto Ohtake; Masanori Yoshikawa

doi:10.1149/1.2086540

Diamond Film Preparation by Arc Discharge Plasma Jet Chemical Vapor Deposition in the Methane Atmosphere

Journal of The Electrochemical Society ◽

10.1149/1.2086540 ◽

1990 ◽

Vol 137 (2) ◽

pp. 717-722 ◽

Cited By ~ 132

Author(s):

Naoto Ohtake ◽

Masanori Yoshikawa

Keyword(s):

Chemical Vapor Deposition ◽

Diamond Film ◽

Vapor Deposition ◽

Discharge Plasma ◽

Arc Discharge ◽

Chemical Vapor ◽

Plasma Jet ◽

Film Preparation

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ChemInform Abstract: Diamond Film Preparation by Arc Discharge Plasma Jet Chemical Vapor Deposition in the Methane Atmosphere.

ChemInform ◽

10.1002/chin.199019028 ◽

1990 ◽

Vol 21 (19) ◽

Author(s):

N. OHTAKE ◽

M. YOSHIKAWA

Keyword(s):

Chemical Vapor Deposition ◽

Diamond Film ◽

Vapor Deposition ◽

Discharge Plasma ◽

Arc Discharge ◽

Chemical Vapor ◽

Plasma Jet ◽

Film Preparation

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Effects of Oxygen Addition on Growth of Diamond Film by Arc Discharge Plasma Jet Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.2067 ◽

1993 ◽

Vol 32 (Part 1, No. 5A) ◽

pp. 2067-2073 ◽

Cited By ~ 12

Author(s):

Naoto Ohtake ◽

Masanori Yoshikawa

Keyword(s):

Chemical Vapor Deposition ◽

Diamond Film ◽

Vapor Deposition ◽

Discharge Plasma ◽

Arc Discharge ◽

Chemical Vapor ◽

Plasma Jet ◽

Oxygen Addition

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Nucleation effects and characteristics of diamond film grown by arc discharge plasma jet chemical vapor deposition

Thin Solid Films ◽

10.1016/0040-6090(92)90507-8 ◽

1992 ◽

Vol 212 (1-2) ◽

pp. 112-121 ◽

Cited By ~ 10

Author(s):

Naoto Ohtake ◽

Masanori Yoshikawa

Keyword(s):

Chemical Vapor Deposition ◽

Diamond Film ◽

Vapor Deposition ◽

Discharge Plasma ◽

Arc Discharge ◽

Chemical Vapor ◽

Plasma Jet

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Purification of diamond films by applying current into the plasma stream in the arc discharge plasma jet chemical vapor deposition technique

Journal of Applied Physics ◽

10.1063/1.359074 ◽

1995 ◽

Vol 77 (12) ◽

pp. 6636-6640 ◽

Cited By ~ 5

Author(s):

Nobuei Ito ◽

Minoru Yamamoto ◽

Satoshi Nakamura ◽

Tadashi Hattori

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Discharge Plasma ◽

Arc Discharge ◽

Diamond Films ◽

Chemical Vapor ◽

Plasma Jet ◽

Plasma Stream ◽

Deposition Technique ◽

Vapor Deposition Technique

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Effects of electrode arrangement and pressure on synthesis of diamond films by arc discharge plasma jet chemical vapor deposition

Diamond and Related Materials ◽

10.1016/0925-9635(95)00324-x ◽

1995 ◽

Vol 4 (12) ◽

pp. 1363-1370 ◽

Cited By ~ 6

Author(s):

Atsushi Hirata ◽

Masanori Yoshikawa

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Discharge Plasma ◽

Arc Discharge ◽

Diamond Films ◽

Chemical Vapor ◽

Plasma Jet ◽

Electrode Arrangement

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In situRaman characterization of a diamond film during its growth process in a plasma jet chemical vapor deposition reactor

Journal of Applied Physics ◽

10.1063/1.360636 ◽

1995 ◽

Vol 78 (1) ◽

pp. 519-527 ◽

Cited By ~ 12

Author(s):

N. Rosman ◽

L. Abello ◽

J. P. Chabert ◽

G. Verven ◽

G. Lucazeau

Keyword(s):

Chemical Vapor Deposition ◽

Diamond Film ◽

Vapor Deposition ◽

Growth Process ◽

Chemical Vapor ◽

Plasma Jet ◽

Chemical Vapor Deposition Reactor

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Diamond film preparation by arc-discharge plasma-jet-CVD and thermodynamic calculation of the equilibrium gas composition

Diamond and Related Materials ◽

10.1016/0925-9635(92)90062-s ◽

1992 ◽

Vol 1 (2-4) ◽

pp. 380-387 ◽

Cited By ~ 6

Author(s):

A. Boudina ◽

E. Fitzer ◽

G. Wahl

Keyword(s):

Diamond Film ◽

Thermodynamic Calculation ◽

Discharge Plasma ◽

Arc Discharge ◽

Plasma Jet ◽

Gas Composition ◽

Film Preparation

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Enlargement of Diamond Film Area Synthesized by Direct Current Arc Discharge Plasma Jet Chemical Vapor Depositon.

Journal of the Japan Society for Precision Engineering ◽

10.2493/jjspe.58.1672 ◽

1992 ◽

Vol 58 (10) ◽

pp. 1672-1678 ◽

Cited By ~ 2

Author(s):

Nobuhiro NOTO ◽

Kintaro MORI

Keyword(s):

Direct Current ◽

Diamond Film ◽

Discharge Plasma ◽

Arc Discharge ◽

Chemical Vapor ◽

Plasma Jet ◽

Film Area

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Smooth diamond film deposition by a. c. discharge plasma chemical vapor deposition

Thin Solid Films ◽

10.1016/0040-6090(91)90422-t ◽

1991 ◽

Vol 206 (1-2) ◽

pp. 204-207 ◽

Cited By ~ 4

Author(s):

S.Y. Choi ◽

C.J. Zhang ◽

G.S. Lee

Keyword(s):

Chemical Vapor Deposition ◽

Diamond Film ◽

Vapor Deposition ◽

Discharge Plasma ◽

Chemical Vapor ◽

Film Deposition ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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Fabrication of layered self-standing diamond film by dc arc plasma jet chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.2409940 ◽

2007 ◽

Vol 25 (1) ◽

pp. L1-L3 ◽

Cited By ~ 2

Author(s):

G. C. Chen ◽

F. W. Dai ◽

B. Li ◽

H. Lan ◽

J. Askari ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Diamond Film ◽

Vapor Deposition ◽

Chemical Vapor ◽

Plasma Jet ◽

Arc Plasma ◽

Dc Arc

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