A Direct Simulation Monte Carlo Study of Flow Considerations in Plasma Reactor Development for 300 mm Processing

D. Hash; M. Meyyappan

doi:10.1149/1.1838126

A Direct Simulation Monte Carlo Study of Flow Considerations in Plasma Reactor Development for 300 mm Processing

Journal of The Electrochemical Society ◽

10.1149/1.1838126 ◽

1997 ◽

Vol 144 (11) ◽

pp. 3999-4004 ◽

Cited By ~ 7

Author(s):

D. Hash ◽

M. Meyyappan

Keyword(s):

Monte Carlo ◽

Plasma Reactor ◽

Direct Simulation Monte Carlo ◽

Monte Carlo Study ◽

Direct Simulation ◽

Simulation Monte Carlo

Download Full-text

Direct simulation Monte Carlo study of quantum effects on the spherical expansion of 4He

Physics of Fluids ◽

10.1063/1.870220 ◽

1999 ◽

Vol 11 (10) ◽

pp. 3174-3180 ◽

Cited By ~ 4

Author(s):

Katsuhisa Koura

Keyword(s):

Monte Carlo ◽

Direct Simulation Monte Carlo ◽

Monte Carlo Study ◽

Quantum Effects ◽

Direct Simulation ◽

Spherical Expansion ◽

Simulation Monte Carlo

Download Full-text

Direct simulation Monte Carlo study of metal evaporation with collimator in e-beam physical vapor deposition

Chinese Physics B ◽

10.1088/1674-1056/28/7/074702 ◽

2019 ◽

Vol 28 (7) ◽

pp. 074702

Author(s):

Xiaoyong Lu ◽

Junjie Chai

Keyword(s):

Monte Carlo ◽

Vapor Deposition ◽

Physical Vapor Deposition ◽

Direct Simulation Monte Carlo ◽

Monte Carlo Study ◽

Direct Simulation ◽

Metal Evaporation ◽

Simulation Monte Carlo

Download Full-text

Direct simulation Monte Carlo study of phonon heat conduction in solid nuclear fuels

10.32469/10355/36768 ◽

2012 ◽

Author(s):

Leroy Lee

Keyword(s):

Monte Carlo ◽

Heat Conduction ◽

Direct Simulation Monte Carlo ◽

Monte Carlo Study ◽

Direct Simulation ◽

Nuclear Fuels ◽

Simulation Monte Carlo

Download Full-text

An ab initio chemical reaction model for the direct simulation Monte Carlo study of non-equilibrium nitrogen flows

The Journal of Chemical Physics ◽

10.1063/1.4993307 ◽

2017 ◽

Vol 147 (8) ◽

pp. 084305 ◽

Cited By ~ 7

Author(s):

T. K. Mankodi ◽

U. V. Bhandarkar ◽

B. P. Puranik

Keyword(s):

Monte Carlo ◽

Ab Initio ◽

Chemical Reaction ◽

Direct Simulation Monte Carlo ◽

Monte Carlo Study ◽

Reaction Model ◽

Direct Simulation ◽

Simulation Monte Carlo ◽

Chemical Reaction Model ◽

Nitrogen Flows

Download Full-text

Direct simulation Monte Carlo study of the formation and growth of clusters in the case of vapor expansion from a suddenly switched spherical source

Journal of Applied Mechanics and Technical Physics ◽

10.1007/s10808-009-0012-3 ◽

2009 ◽

Vol 50 (1) ◽

pp. 86-92 ◽

Cited By ~ 1

Author(s):

N. Yu. Bykov ◽

G. A. Lukyanov ◽

O. I. Simakova

Keyword(s):

Monte Carlo ◽

Direct Simulation Monte Carlo ◽

Monte Carlo Study ◽

Direct Simulation ◽

Spherical Source ◽

Simulation Monte Carlo

Download Full-text

Two-dimensional direct simulation Monte Carlo (DSMC) of reactive neutral and ion flow in a high density plasma reactor

IEEE Transactions on Plasma Science ◽

10.1109/27.467978 ◽

1995 ◽

Vol 23 (4) ◽

pp. 581-590 ◽

Cited By ~ 63

Author(s):

D.J. Economou ◽

T.J. Bartel ◽

R.S. Wise ◽

D.P. Lymberopoulos

Keyword(s):

Monte Carlo ◽

Plasma Reactor ◽

Direct Simulation Monte Carlo ◽

High Density ◽

Two Dimensional ◽

Direct Simulation ◽

Ion Flow ◽

Simulation Monte Carlo ◽

Density Plasma

Download Full-text

Direct simulation Monte Carlo study of H/H2and H/H2/CO mixtures for diamond chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.363667 ◽

1996 ◽

Vol 80 (11) ◽

pp. 6474-6488 ◽

Cited By ~ 5

Author(s):

Robert S. Sinkovits ◽

C. Richard DeVore

Keyword(s):

Monte Carlo ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Direct Simulation Monte Carlo ◽

Chemical Vapor ◽

Monte Carlo Study ◽

Direct Simulation ◽

Simulation Monte Carlo ◽

Diamond Chemical Vapor Deposition

Download Full-text

A direct simulation Monte Carlo study of hypersonic leading-edge separation with rarefaction effects

Physics of Fluids ◽

10.1063/1.5030931 ◽

2018 ◽

Vol 30 (6) ◽

pp. 063602 ◽

Cited By ~ 11

Author(s):

R. Prakash ◽

S. Gai ◽

S. O’Byrne

Keyword(s):

Monte Carlo ◽

Direct Simulation Monte Carlo ◽

Leading Edge ◽

Monte Carlo Study ◽

Direct Simulation ◽

Simulation Monte Carlo ◽

Edge Separation ◽

Rarefaction Effects

Download Full-text

A Direct Simulation Monte Carlo Study on the Effect of Temperature Gradient on the Gas Mixing in Microgeometries

10.2514/6.2013-3672 ◽

2013 ◽

Author(s):

Masoud Darbandi ◽

Moslem Sabouri ◽

Elyas Lekzian ◽

Gerry E. Schneider

Keyword(s):

Monte Carlo ◽

Temperature Gradient ◽

Direct Simulation Monte Carlo ◽

Monte Carlo Study ◽

Effect Of Temperature ◽

Direct Simulation ◽

Gas Mixing ◽

Simulation Monte Carlo

Download Full-text

Direct simulation Monte Carlo study of orifice flow

10.1063/1.1407658 ◽

2001 ◽

Cited By ~ 3

Author(s):

G. D. Danilatos

Keyword(s):

Monte Carlo ◽

Direct Simulation Monte Carlo ◽

Monte Carlo Study ◽

Direct Simulation ◽

Orifice Flow ◽

Simulation Monte Carlo

Download Full-text