Two-dimensional direct simulation Monte Carlo (DSMC) of reactive neutral and ion flow in a high density plasma reactor
1995 ◽
Vol 23
(4)
◽
pp. 581-590
◽
Keyword(s):
Ion Flow
◽
2005 ◽
Vol 47
(8)
◽
pp. 805-823
◽
1997 ◽
Vol 144
(11)
◽
pp. 3999-4004
◽
1999 ◽
Vol 27
(5)
◽
pp. 1379-1388
◽
1994 ◽