Etch‐Stop Behavior of Buried Layers Formed by Substoichiometric Nitrogen Ion Implantation into Silicon

1996 ◽  
Vol 143 (3) ◽  
pp. 1026-1033 ◽  
Author(s):  
A. Pérez‐Rodríguez ◽  
A. Romano‐Rodríguez ◽  
J. R. Morante ◽  
M. C. Acero ◽  
J. Esteve ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Nitrogen Ion Implantation ◽  
Etch Stop ◽  
Buried Layers ◽  
Nitrogen Ion

Analysis of buried etch-stop layers in silicon by nitrogen-ion implantation

1993 ◽  
Vol 3 (3) ◽  
pp. 143-145 ◽  
Author(s):  
M C Acero ◽  
A Perez-Rodriguez ◽  
J Esteve ◽  
J Montserrat ◽  
B Garrido ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Nitrogen Ion Implantation ◽  
Etch Stop ◽  
Nitrogen Ion

scholarly journals Effect of Nitrogen Ion Implantation on the Cavitation Erosion Resistance and Cobalt-Based Solid Solution Phase Transformations of HIPed Stellite 6

Materials ◽  
2021 ◽  
Vol 14 (9) ◽  
pp. 2324
Author(s):  
Mirosław Szala ◽  
Dariusz Chocyk ◽  
Anna Skic ◽  
Mariusz Kamiński ◽  
Wojciech Macek ◽  
...  
Keyword(s):  
Plastic Deformation ◽  
Stainless Steel ◽  
Ion Implantation ◽  
Phase Transformations ◽  
Erosion Rate ◽  
Cavitation Erosion ◽  
Matrix Phase ◽  
Nitrogen Ion Implantation ◽  
Stellite 6 ◽  
Nitrogen Ion

From the wide range of engineering materials traditional Stellite 6 (cobalt alloy) exhibits excellent resistance to cavitation erosion (CE). Nonetheless, the influence of ion implantation of cobalt alloys on the CE behaviour has not been completely clarified by the literature. Thus, this work investigates the effect of nitrogen ion implantation (NII) of HIPed Stellite 6 on the improvement of resistance to CE. Finally, the cobalt-rich matrix phase transformations due to both NII and cavitation load were studied. The CE resistance of stellites ion-implanted by 120 keV N+ ions two fluences: 5 × 1016 cm−2 and 1 × 1017 cm−2 were comparatively analysed with the unimplanted stellite and AISI 304 stainless steel. CE tests were conducted according to ASTM G32 with stationary specimen method. Erosion rate curves and mean depth of erosion confirm that the nitrogen-implanted HIPed Stellite 6 two times exceeds the resistance to CE than unimplanted stellite, and has almost ten times higher CE reference than stainless steel. The X-ray diffraction (XRD) confirms that NII of HIPed Stellite 6 favours transformation of the ε(hcp) to γ(fcc) structure. Unimplanted stellite ε-rich matrix is less prone to plastic deformation than γ and consequently, increase of γ phase effectively holds carbides in cobalt matrix and prevents Cr7C3 debonding. This phenomenon elongates three times the CE incubation stage, slows erosion rate and mitigates the material loss. Metastable γ structure formed by ion implantation consumes the cavitation load for work-hardening and γ → ε martensitic transformation. In further CE stages, phases transform as for unimplanted alloy namely, the cavitation-inducted recovery process, removal of strain, dislocations resulting in increase of γ phase. The CE mechanism was investigated using a surface profilometer, atomic force microscopy, SEM-EDS and XRD. HIPed Stellite 6 wear behaviour relies on the plastic deformation of cobalt matrix, starting at Cr7C3/matrix interfaces. Once the Cr7C3 particles lose from the matrix restrain, they debond from matrix and are removed from the material. Carbides detachment creates cavitation pits which initiate cracks propagation through cobalt matrix, that leads to loss of matrix phase and as a result the CE proceeds with a detachment of massive chunk of materials.

Corrosion resistance and magnetostrictive properties of (Tb0.3Dy0.7)Fe2 alloy modified by nitrogen ion implantation

2015 ◽  
Vol 33 (6) ◽  
pp. 629-632 ◽  
Author(s):  
Hongchuan YANG ◽  
Shirong ZHANG ◽  
Dunbo YU ◽  
Kuoshe LI ◽  
Quanxia HU ◽  
...  
Keyword(s):  
Corrosion Resistance ◽  
Ion Implantation ◽  
Nitrogen Ion Implantation ◽  
Nitrogen Ion

Effects of nitrogen ion implantation on the thermal stability of tungsten thin films

1998 ◽  
Vol 16 (2) ◽  
pp. 477-481 ◽  
Author(s):  
Yong Tae Kim ◽  
Chul Soon Kwon ◽  
Dong Joon Kim ◽  
Jong-Wan Park ◽  
Chang Woo Lee
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Ion Implantation ◽  
Nitrogen Ion Implantation ◽  
Nitrogen Ion ◽  
Thermal Stability Of

Novel chromium layers formed by nitrogen-ion implantation of conventional and ABCD electrodeposited films, part 4

1990 ◽  
Vol 16 (1-12) ◽  
pp. 488-492 ◽  
Author(s):  
Hermann Ferber ◽  
Gar B. Hoflund ◽  
Charles K. Mount ◽  
Shigeo Hoshino
Keyword(s):  
Ion Implantation ◽  
Nitrogen Ion Implantation ◽  
Nitrogen Ion

Synthesis of Iron Oxynitride by Nitrogen Ion Implantation of Iron Oxide

1988 ◽  
Vol 100 ◽  
Author(s):  
S. B. Ogale ◽  
Seema Teli ◽  
Sunita Chopda ◽  
D. M. Phase ◽  
S. M. Kanetkar
Keyword(s):  
Iron Oxide ◽  
Ion Implantation ◽  
Conversion Electron ◽  
Mossbauer Spectroscopy ◽  
Nitrogen Implantation ◽  
Nitrogen Ion Implantation ◽  
Conversion Electron Mössbauer Spectroscopy ◽  
Conversion Electron Mossbauer Spectroscopy ◽  
Implantation Process ◽  
Nitrogen Ion

ABSTRACTThe effect of N2+ ion implantation in ∝-Fe2O3 has been investigated by means of Conversion Electron Mossbauer Spectroscopy (CEMS). It Is shown that at a dose value of 1×1017 ions/cm2 and 3×1017 Ions/cm2 the samples exhibit new Interesting hyperfine features which can not be ascribed to known oxide or nitride phases. It Is thus concluded that Iron Oxynitrlde Is formed by the nitrogen Implantation process.

Sign in / Sign up

Export Citation Format

Share Document