Etching High Aspect Ratio Silicon Trenches

Siddhartha Panda; Rajiv Ranade; G. Swami Mathad

doi:10.1149/1.1603254

Etching High Aspect Ratio Silicon Trenches

Journal of The Electrochemical Society ◽

10.1149/1.1603254 ◽

2003 ◽

Vol 150 (10) ◽

pp. G612 ◽

Cited By ~ 17

Author(s):

Siddhartha Panda ◽

Rajiv Ranade ◽

G. Swami Mathad

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Silicon Trenches

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Cryogenic etch process development for profile control of high aspect-ratio submicron silicon trenches

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2402151 ◽

2007 ◽

Vol 25 (1) ◽

pp. 21 ◽

Cited By ~ 38

Author(s):

Marcel W. Pruessner ◽

William S. Rabinovich ◽

Todd H. Stievater ◽

Doewon Park ◽

Jeffrey W. Baldwin

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Process Development ◽

Profile Control ◽

Silicon Trenches

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High Aspect Ratio Sub-15 nm Silicon Trenches From Block Copolymer Templates

Advanced Materials ◽

10.1002/adma.201202361 ◽

2012 ◽

Vol 24 (42) ◽

pp. 5688-5694 ◽

Cited By ~ 69

Author(s):

Xiaodan Gu ◽

Zuwei Liu ◽

Ilja Gunkel ◽

S. T. Chourou ◽

Sung Woo Hong ◽

...

Keyword(s):

Block Copolymer ◽

Aspect Ratio ◽

High Aspect Ratio ◽

Silicon Trenches

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Patterning: High Aspect Ratio Sub-15 nm Silicon Trenches From Block Copolymer Templates (Adv. Mater. 42/2012)

Advanced Materials ◽

10.1002/adma.201290259 ◽

2012 ◽

Vol 24 (42) ◽

pp. 5687-5687 ◽

Cited By ~ 1

Author(s):

Xiaodan Gu ◽

Zuwei Liu ◽

Ilja Gunkel ◽

S. T. Chourou ◽

Sung Woo Hong ◽

...

Keyword(s):

Block Copolymer ◽

Aspect Ratio ◽

High Aspect Ratio ◽

Silicon Trenches

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FORMATION OF THICK HIGH-ASPECT-RATIO RESISTIVE MASKS BY THE CONTACT PHOTOLITHOGRAPHY METHOD

Автометрия ◽

10.15372/aut20180202 ◽

2018 ◽

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio

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Low and heat transfer in a high-aspect-ratio rib-roughed cooling channel with longitudinal intersecting ribs

Прикладная механика и техническая физика ◽

10.15372/pmtf20180414 ◽

2018 ◽

Keyword(s):

Heat Transfer ◽

Aspect Ratio ◽

High Aspect Ratio ◽

Cooling Channel

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HEAT TRANSFER IN A FLAT CHANNEL WITH HIGH ASPECT RATIO AT A HEAT CARRIER FLOW WITH LOW-PRANDTL NUMBER

10.1615/ihtc16.cov.022710 ◽

2018 ◽

Author(s):

Viktor S. Naumkin ◽

O.V. Vitovsky ◽

Maksim S. Makarov ◽

V. E. Nakoryakov

Keyword(s):

Heat Transfer ◽

Aspect Ratio ◽

Prandtl Number ◽

Heat Carrier ◽

High Aspect Ratio ◽

Flat Channel ◽

Carrier Flow

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HEAT TRANSFER AND PRESSURE LOSS PERFORMANCE FOR FAMILIES OF PARTIAL LENGTH PIN FIN ARRAYS IN HIGH ASPECT RATIO RECTANGULAR DUCTS

Proceeding of International Heat Transfer Conference 8 ◽

10.1615/ihtc8.1470 ◽

1986 ◽

Cited By ~ 4

Author(s):

G. D. Steuber ◽

D. E. Metzger

Keyword(s):

Heat Transfer ◽

Aspect Ratio ◽

High Aspect Ratio ◽

Pressure Loss ◽

Pin Fin ◽

Partial Length ◽

Pin Fin Arrays

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High quality and high aspect ratio processing of multilayer structures with dissimilar material properties by UV laser microjet

International Congress on Applications of Lasers & Electro-Optics ◽

10.2351/1.5118615 ◽

2016 ◽

Author(s):

Jérémie Diboine ◽

Pierre Leroux ◽

Helgi Diehl ◽

Bernold Richerzhagen

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Material Properties ◽

Dissimilar Material ◽

Multilayer Structures ◽

Uv Laser ◽

High Quality

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Experimental and theoretical study of gust response for high-aspect-ratio wing

AIAA Journal ◽

10.2514/3.15078 ◽

2002 ◽

Vol 40 ◽

pp. 419-429 ◽

Cited By ~ 2

Author(s):

D. Tang ◽

E. H. Dowell

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Theoretical Study ◽

Gust Response

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Use of High Aspect Ratio Kaolin as a Tool to Control the Strength and Stiffness Properties of Coated Papers

JAPAN TAPPI JOURNAL ◽

10.2524/jtappij.62.694 ◽

2008 ◽

Vol 62 (6) ◽

pp. 694-699

Author(s):

John C. Husband

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Coated Papers ◽

Stiffness Properties ◽

Strength And Stiffness

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