Feasibility of Nitrogen (or Oxygen)-Incorporated Ruthenium Titanium Ternary Diffusion Barrier Suggested by a New Design Concept for Future High-Density Memory Capacitors

2002 ◽  
Vol 149 (9) ◽  
pp. F110
Author(s):  
Dong-Soo Yoon ◽  
Jae Sung Roh
Keyword(s):  
Diffusion Barrier ◽  
High Density ◽  
Design Concept ◽  
Ternary Diffusion

scholarly journals Abrupt Flushing of High-Density Core in Internal Diffusion Barrier Plasmas and its Suppression by Plasma Shape Control in LHD

2008 ◽  
Vol 3 (0) ◽  
pp. S1047-S1047 ◽  
Author(s):  
Junichi MIYAZAWA ◽  
Ryuichi SAKAMOTO ◽  
Satoshi OHDACHI ◽  
Masahiro KOBAYASHI ◽  
Suguru MASUZAKI ◽  
...  
Keyword(s):  
Diffusion Barrier ◽  
Shape Control ◽  
High Density ◽  
Internal Diffusion

Integration and electrical properties of diffusion barrier for high density ferroelectric memory

2000 ◽  
Vol 76 (4) ◽  
pp. 451-453 ◽  
Author(s):  
Yoon J. Song ◽  
H. H. Kim ◽  
Sung Y. Lee ◽  
D. J. Jung ◽  
B. J. Koo ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Diffusion Barrier ◽  
High Density ◽  
Ferroelectric Memory

A novel diffusion barrier using oxygen stopping layer for high density FRAM

2000 ◽  
Vol 31 (1-4) ◽  
pp. 351-358 ◽  
Author(s):  
Yoon J. Song ◽  
H. H. Kim ◽  
S. Y. Lee ◽  
D. J. Jung ◽  
B. J. Koo ◽  
...  
Keyword(s):  
Diffusion Barrier ◽  
High Density
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