Fabrication of High Performance Low-Temperature Poly-Si Thin-Film Transistors Using a Modulated Process

2002 ◽  
Vol 149 (4) ◽  
pp. H93 ◽  
Author(s):  
Ching-Lin Fan ◽  
Mao-Chieh Chen
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
High Performance ◽  
Modulated Process ◽  
Si Thin Film

Excimer-Laser Growth of Si Large-Grain Arrays

2004 ◽  
Vol 808 ◽  
Author(s):  
Masakiyo Matsumura
Keyword(s):  
Thin Film ◽  
Liquid Crystal ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
High Performance ◽  
Liquid Crystal Displays ◽  
Medium Size ◽  
Large Area ◽  
Development Center ◽  
Si Thin Film

ABSTRACTAmorphous silicon (a-Si) Thin Film Transistors (TFT) will continue to play an important role in large-area liquid crystal displays (LCD), however, there is also a strong demand for ultra-high performance TFTs aimed at intelligent small (or medium) size displays. For this reason, “Crystal Si on glass” has become an increasingly attractive solution. This paper reviews recent work performed at ALTEDEC (Advanced LCD Technologies Development Center Co., Ltd, with regard to growing an array of large Si grains at low temperature. The results obtained so far indicate that satisfactory progress has been made towards the achievement of this goal.

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