Tapping-mode atomic force microscopy and phase-imaging in higher eigenmodes

Robert W. Stark; Tanja Drobek; Wolfgang M. Heckl

doi:10.1063/1.123323

Tapping-mode atomic force microscopy and phase-imaging in higher eigenmodes

Applied Physics Letters ◽

10.1063/1.123323 ◽

1999 ◽

Vol 74 (22) ◽

pp. 3296-3298 ◽

Cited By ~ 80

Author(s):

Robert W. Stark ◽

Tanja Drobek ◽

Wolfgang M. Heckl

Keyword(s):

Atomic Force Microscopy ◽

Phase Imaging ◽

Tapping Mode ◽

Force Microscopy ◽

Atomic Force ◽

Mode Atomic Force Microscopy

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Application of phase-imaging tapping-mode atomic-force microscopy to investigate the grain growth and surface morphology of TiSi[sub 2]

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1501580 ◽

2002 ◽

Vol 20 (5) ◽

pp. 1866 ◽

Cited By ~ 5

Author(s):

C. H. Pang ◽

P. Hing ◽

A. See

Keyword(s):

Atomic Force Microscopy ◽

Surface Morphology ◽

Grain Growth ◽

Phase Imaging ◽

Tapping Mode ◽

Force Microscopy ◽

Atomic Force ◽

Mode Atomic Force Microscopy

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Two-dimensional dopant profiling of patterned Si wafers using phase imaging tapping mode atomic force microscopy with applied biases

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.590760 ◽

1999 ◽

Vol 17 (4) ◽

pp. 1354 ◽

Cited By ~ 12

Author(s):

M. W. Nelson ◽

P. G. Schroeder ◽

R. Schlaf ◽

B. A. Parkinson

Keyword(s):

Atomic Force Microscopy ◽

Phase Imaging ◽

Two Dimensional ◽

Tapping Mode ◽

Dopant Profiling ◽

Force Microscopy ◽

Atomic Force ◽

Mode Atomic Force Microscopy

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The role of damping in phase imaging in tapping mode atomic force microscopy

Surface Science ◽

10.1016/s0039-6028(99)00368-4 ◽

1999 ◽

Vol 429 (1-3) ◽

pp. 178-185 ◽

Cited By ~ 48

Author(s):

Lugen Wang

Keyword(s):

Atomic Force Microscopy ◽

Phase Imaging ◽

Tapping Mode ◽

Force Microscopy ◽

Atomic Force ◽

Mode Atomic Force Microscopy

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Description of phase imaging in tapping mode atomic force microscopy by harmonic approximation

Surface Science ◽

10.1016/s0039-6028(98)00349-5 ◽

1998 ◽

Vol 411 (1-2) ◽

pp. L794-L801 ◽

Cited By ~ 46

Author(s):

Myung-Hwan Whangbo ◽

Georg Bar ◽

Rainer Brandsch

Keyword(s):

Atomic Force Microscopy ◽

Harmonic Approximation ◽

Phase Imaging ◽

Tapping Mode ◽

Force Microscopy ◽

Atomic Force ◽

Mode Atomic Force Microscopy

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Correlation between frequency-sweep hysteresis and phase imaging instability in tapping mode atomic force microscopy

Surface Science ◽

10.1016/s0039-6028(99)00702-5 ◽

1999 ◽

Vol 436 (1-3) ◽

pp. L715-L723 ◽

Cited By ~ 4

Author(s):

Georg Bar ◽

Rainer Brandsch ◽

Myung-Hwan Whangbo

Keyword(s):

Atomic Force Microscopy ◽

Phase Imaging ◽

Frequency Sweep ◽

Tapping Mode ◽

Force Microscopy ◽

Atomic Force ◽

Mode Atomic Force Microscopy

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Two-Dimensional Dopant Profiling of an Integrated Circuit Using Bias-Applied Phase-Imaging Tapping Mode Atomic Force Microscopy

Electrochemical and Solid-State Letters ◽

10.1149/1.1390875 ◽

1999 ◽

Vol 2 (9) ◽

pp. 475 ◽

Cited By ~ 6

Author(s):

M. W. Nelson

Keyword(s):

Atomic Force Microscopy ◽

Integrated Circuit ◽

Phase Imaging ◽

Two Dimensional ◽

Tapping Mode ◽

Dopant Profiling ◽

Force Microscopy ◽

Atomic Force ◽

Mode Atomic Force Microscopy

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Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1614252 ◽

2003 ◽

Vol 21 (6) ◽

pp. 3102 ◽

Cited By ~ 71

Author(s):

R. Pedrak ◽

Tzv. Ivanov ◽

K. Ivanova ◽

T. Gotszalk ◽

N. Abedinov ◽

...

Keyword(s):

Atomic Force Microscopy ◽

High Speed ◽

Phase Imaging ◽

Tapping Mode ◽

Force Microscopy ◽

Atomic Force ◽

Piezoresistive Sensor ◽

Mode Atomic Force Microscopy

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From Images to Interactions: High-Resolution Phase Imaging in Tapping-Mode Atomic Force Microscopy

Biophysical Journal ◽

10.1016/s0006-3495(01)76266-2 ◽

2001 ◽

Vol 80 (6) ◽

pp. 3009-3018 ◽

Cited By ~ 111

Author(s):

Martin Stark ◽

Clemens Möller ◽

Daniel J. Müller ◽

Reinhard Guckenberger

Keyword(s):

Atomic Force Microscopy ◽

High Resolution ◽

Phase Imaging ◽

Tapping Mode ◽

Force Microscopy ◽

Atomic Force ◽

Mode Atomic Force Microscopy

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Phase imaging and stiffness in tapping-mode atomic force microscopy

Surface Science ◽

10.1016/s0039-6028(96)01591-9 ◽

1997 ◽

Vol 375 (2-3) ◽

pp. L385-L391 ◽

Cited By ~ 647

Author(s):

S.N. Magonov ◽

V. Elings ◽

M.-H. Whangbo

Keyword(s):

Atomic Force Microscopy ◽

Phase Imaging ◽

Tapping Mode ◽

Force Microscopy ◽

Atomic Force ◽

Mode Atomic Force Microscopy

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Effect of tip sharpness on the relative contributions of attractive and repulsive forces in the phase imaging of tapping mode atomic force microscopy

Surface Science ◽

10.1016/s0039-6028(98)00899-1 ◽

1999 ◽

Vol 422 (1-3) ◽

pp. L192-L199 ◽

Cited By ~ 14

Author(s):

G. Bar ◽

R. Brandsch ◽

M.-H. Whangbo

Keyword(s):

Atomic Force Microscopy ◽

Phase Imaging ◽

Tapping Mode ◽

Force Microscopy ◽

Atomic Force ◽

Repulsive Forces ◽

Mode Atomic Force Microscopy

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