Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes
2003 ◽
Vol 21
(6)
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pp. 3102
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2003 ◽
Vol 74
(11)
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pp. 4683-4686
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2002 ◽
Vol 20
(5)
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pp. 1866
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1999 ◽
Vol 17
(4)
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pp. 1354
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2014 ◽
Vol 85
(12)
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pp. 123705
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1999 ◽
Vol 429
(1-3)
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pp. 178-185
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Keyword(s):
1998 ◽
Vol 411
(1-2)
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pp. L794-L801
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1999 ◽
Vol 436
(1-3)
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pp. L715-L723
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Keyword(s):
1999 ◽
Vol 2
(9)
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pp. 475
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2001 ◽
Vol 80
(6)
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pp. 3009-3018
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Keyword(s):
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