Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes

Author(s):  
R. Pedrak ◽  
Tzv. Ivanov ◽  
K. Ivanova ◽  
T. Gotszalk ◽  
N. Abedinov ◽  
...  
2003 ◽  
Vol 74 (11) ◽  
pp. 4683-4686 ◽  
Author(s):  
B. Rogers ◽  
T. Sulchek ◽  
K. Murray ◽  
D. York ◽  
M. Jones ◽  
...  

2001 ◽  
Vol 80 (6) ◽  
pp. 3009-3018 ◽  
Author(s):  
Martin Stark ◽  
Clemens Möller ◽  
Daniel J. Müller ◽  
Reinhard Guckenberger

1999 ◽  
Vol 74 (22) ◽  
pp. 3296-3298 ◽  
Author(s):  
Robert W. Stark ◽  
Tanja Drobek ◽  
Wolfgang M. Heckl

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