Real Time Spectroscopic Ellipsometry Study on Growth Processes of ZrO[sub 2] Thin Films in Metallorganic Chemical Vapor Deposition

2001 ◽  
Vol 148 (9) ◽  
pp. C632 ◽  
Author(s):  
Takeo Kubota ◽  
Nobuyoshi Hara ◽  
Katsuhisa Sugimoto
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Real Time ◽  
Spectroscopic Ellipsometry ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Growth Processes

Real time measurements of charged gas phase nuclei during the deposition of silicon thin films by hot wire chemical vapor deposition

2013 ◽  
Vol 13 ◽  
pp. S45-S49 ◽  
Author(s):  
Ju-Seop Hong ◽  
Chan-Soo Kim ◽  
Seung-Wan Yoo ◽  
Seong-Han Park ◽  
Sung-Soo Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Real Time ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Hot Wire ◽  
Silicon Thin Films

Real time spectroscopic ellipsometry characterization of the nucleation of diamond by filament‐assisted chemical vapor deposition

1992 ◽  
Vol 71 (10) ◽  
pp. 5287-5289 ◽  
Author(s):  
R. W. Collins ◽  
Yue Cong ◽  
H. V. Nguyen ◽  
Ilsin An ◽  
K. Vedam ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Real Time ◽  
Spectroscopic Ellipsometry ◽  
Vapor Deposition ◽  
Chemical Vapor

In Situ Growth Monitoring During Metalorganic Chemical Vapor Deposition of YBa 2Cu 3Ox Thin Films by Spectroscopic Ellipsometry

1999 ◽  
Vol 38 (Part 2, No. 6A/B) ◽  
pp. L632-L635 ◽  
Author(s):  
Shuu'ichirou Yamamoto ◽  
Satoshi Sugai ◽  
Yasunari Matsukawa ◽  
Akio Sengoku ◽  
Hiroshi Tobisaka ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Spectroscopic Ellipsometry ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Growth Monitoring ◽  
In Situ Growth ◽  
Metalorganic Chemical

Anatomy of μc-Si thin films by plasma enhanced chemical vapor deposition: An investigation by spectroscopic ellipsometry

2000 ◽  
Vol 88 (5) ◽  
pp. 2408-2414 ◽  
Author(s):  
M. Losurdo ◽  
R. Rizzoli ◽  
C. Summonte ◽  
G. Cicala ◽  
P. Capezzuto ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Spectroscopic Ellipsometry ◽  
Vapor Deposition ◽  
Chemical Vapor
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