Silicon Epitaxial Layer Lifetime Characterization

2001 ◽  
Vol 148 (8) ◽  
pp. G411 ◽  
Author(s):  
J. E. Park ◽  
D. K. Schroder ◽  
S. E. Tan ◽  
B. D. Choi ◽  
M. Fletcher ◽  
...  
Keyword(s):  
Epitaxial Layer ◽  
Silicon Epitaxial Layer

The Mechanism of Silicon Epitaxial Layer Growth from Ion-Molecular Beams

1979 ◽  
Vol 54 (2) ◽  
pp. 463-469 ◽  
Author(s):  
L. N. Aeksandrov ◽  
A. S. Ltovich ◽  
E. D. Blorusets
Keyword(s):  
Epitaxial Layer ◽  
Molecular Beams ◽  
Layer Growth ◽  
Silicon Epitaxial Layer

Effect of rapid thermal annealing on the strain relaxation in heavily boron doped silicon epitaxial layer

1995 ◽  
Vol 77 (7) ◽  
pp. 2974-2977 ◽  
Author(s):  
Jiangbao Wang ◽  
Qiang Xu ◽  
Jian Yuan ◽  
Fang Lu ◽  
Henghui Sun ◽  
...  
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Epitaxial Layer ◽  
Strain Relaxation ◽  
Boron Doped ◽  
Doped Silicon ◽  
Silicon Epitaxial Layer

Structural, optical and electrical characterization of porous silicon prepared on thin silicon epitaxial layer

2009 ◽  
Vol 924-926 ◽  
pp. 285-290 ◽  
Author(s):  
M. Balarin ◽  
O. Gamulin ◽  
M. Ivanda ◽  
M. Kosović ◽  
D. Ristić ◽  
...  
Keyword(s):  
Porous Silicon ◽  
Epitaxial Layer ◽  
Electrical Characterization ◽  
Silicon Epitaxial Layer ◽  
Thin Silicon
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