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Very Low Temperature Epitaxy of Heavily In-situ Phosphorous Doped Ge Layers and High Sn Content GeSn Layers
ECS Transactions
◽
10.1149/07508.0387ecst
◽
2016
◽
Vol 75
(8)
◽
pp. 387-398
◽
Cited By ~ 4
Author(s):
J. Aubin
◽
J.-M. Hartmann
◽
J.-P. Barnes
◽
J.-B. Pin
◽
M. Bauer
Keyword(s):
Low Temperature
◽
Low Temperature Epitaxy
◽
Very Low Temperature
Download Full-text
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Cited By
References
Very Low Temperature Epitaxy of Heavily In-situ Phosphorous Doped Ge Layers and High Sn Content GeSn Layers
ECS Meeting Abstracts
◽
10.1149/ma2016-02/30/2032
◽
2016
◽
Keyword(s):
Low Temperature
◽
Low Temperature Epitaxy
◽
Very Low Temperature
Download Full-text
Very Low Temperature Epitaxy of Heavily In Situ Phosphorous Doped Ge Layers and High Sn Content GeSn Layers
ECS Journal of Solid State Science and Technology
◽
10.1149/2.0091701jss
◽
2016
◽
Vol 6
(1)
◽
pp. P21-P26
◽
Cited By ~ 15
Author(s):
J. Aubin
◽
J. M. Hartmann
◽
J. P. Barnes
◽
J. B. Pin
◽
M. Bauer
Keyword(s):
Low Temperature
◽
Low Temperature Epitaxy
◽
Very Low Temperature
Download Full-text
LOW-TEMPERATURE EPITAXY AND IN-SITU DOPING OF SILICON FILMS
Journal de Physique IV (Proceedings)
◽
10.1051/jp4:1991292
◽
1991
◽
Vol 02
(C2)
◽
pp. C2-787-C2-794
Author(s):
R. KIRCHER
◽
M. FURUNO
◽
J. MUROTA
◽
S. ONO
Keyword(s):
Low Temperature
◽
Silicon Films
◽
Low Temperature Epitaxy
Download Full-text
Very Low Temperature (Cyclic) Deposition / Etch of In-Situ Raised Sources and Drains
ECS Meeting Abstracts
◽
10.1149/ma2014-02/35/1852
◽
2014
◽
Keyword(s):
Low Temperature
◽
Very Low Temperature
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(Invited) Very Low Temperature Epitaxy of Group-IV Semiconductors for Use in Finfet, Stacked Nanowires and Monolithic 3D Integration
ECS Meeting Abstracts
◽
10.1149/ma2018-02/31/1050
◽
2018
◽
Keyword(s):
Low Temperature
◽
Group Iv
◽
3D Integration
◽
Group Iv Semiconductors
◽
Low Temperature Epitaxy
◽
Very Low Temperature
Download Full-text
Formation mechanism and properties of CdSe quantum dots on ZnSe by low temperature epitaxy and in situ annealing
Applied Physics Letters
◽
10.1063/1.2234279
◽
2006
◽
Vol 89
(4)
◽
pp. 043102
◽
Cited By ~ 14
Author(s):
S. Mahapatra
◽
T. Kiessling
◽
E. Margapoti
◽
G. V. Astakhov
◽
W. Ossau
◽
...
Keyword(s):
Quantum Dots
◽
Low Temperature
◽
Formation Mechanism
◽
Cdse Quantum Dots
◽
Low Temperature Epitaxy
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Very low temperature epitaxy of Ge and Ge rich SiGe alloys with Ge2H6 in a Reduced Pressure – Chemical Vapour Deposition tool
Journal of Crystal Growth
◽
10.1016/j.jcrysgro.2016.04.018
◽
2016
◽
Vol 445
◽
pp. 65-72
◽
Cited By ~ 14
Author(s):
J. Aubin
◽
J.M. Hartmann
◽
M. Bauer
◽
S. Moffatt
Keyword(s):
Low Temperature
◽
Chemical Vapour Deposition
◽
Vapour Deposition
◽
Chemical Vapour
◽
Reduced Pressure
◽
Pressure Chemical
◽
Low Temperature Epitaxy
◽
Very Low Temperature
Download Full-text
CdSe/ZnSe Quantum Dots Formed by Low Temperature Epitaxy and In-Situ Annealing: Properties and Growth Optimization
Acta Physica Polonica A
◽
10.12693/aphyspola.108.769
◽
2005
◽
Vol 108
(5)
◽
pp. 769-776
◽
Cited By ~ 8
Author(s):
S. Mahapatra
◽
C. Schumacher
◽
T. Kiessling
◽
G.V. Astakhov
◽
U. Bass
◽
...
Keyword(s):
Quantum Dots
◽
Low Temperature
◽
Growth Optimization
◽
Low Temperature Epitaxy
Download Full-text
(Invited) Very Low Temperature Epitaxy of Group-IV Semiconductors for Use in FinFET, Stacked Nanowires and Monolithic 3D Integration
ECS Transactions
◽
10.1149/08607.0163ecst
◽
2018
◽
Vol 86
(7)
◽
pp. 163-175
◽
Cited By ~ 4
Author(s):
Clement Porret
◽
Andriy Yakovitch Hikavyy
◽
Juan Fernando Gomez Granados
◽
Sylvain Baudot
◽
Anurag Vohra
◽
...
Keyword(s):
Low Temperature
◽
Group Iv
◽
3D Integration
◽
Group Iv Semiconductors
◽
Low Temperature Epitaxy
◽
Very Low Temperature
Download Full-text
Very Low Temperature Epitaxy of Group-IV Semiconductors for Use in FinFET, Stacked Nanowires and Monolithic 3D Integration
ECS Journal of Solid State Science and Technology
◽
10.1149/2.0071908jss
◽
2019
◽
Vol 8
(8)
◽
pp. P392-P399
◽
Cited By ~ 1
Author(s):
C. Porret
◽
A. Hikavyy
◽
J. F. Gomez Granados
◽
S. Baudot
◽
A. Vohra
◽
...
Keyword(s):
Low Temperature
◽
Group Iv
◽
3D Integration
◽
Group Iv Semiconductors
◽
Low Temperature Epitaxy
◽
Very Low Temperature
Download Full-text
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