Characterization of dye laser pumping using a high power KrF excimer laser at 248 nm

1979 ◽  
Vol 57 (9) ◽  
pp. 1432-1436 ◽  
Author(s):  
T. J. McKee ◽  
D. J. James
Keyword(s):  
Excimer Laser ◽  
High Power ◽  
Dye Laser ◽  
Laser Pumping ◽  
Krf Excimer Laser

Characterization of metal surfaces irradiated by a long‐pulse KrF excimer laser

1994 ◽  
Vol 6 (3) ◽  
pp. 149-152
Author(s):  
Th. Sarnet ◽  
J. E. Montagne ◽  
G. Inglesakis ◽  
M. Autric ◽  
L. Barrallier ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Metal Surfaces ◽  
Krf Excimer Laser ◽  
Long Pulse

High-power KrF excimer laser with a solid state switch for microlithography

1996 ◽  
Author(s):  
Hakaru Mizoguchi ◽  
Noritoshi Ito ◽  
Hiroaki Nakarai ◽  
Yukio Kobayashi ◽  
Yasuo Itakura ◽  
...  
Keyword(s):  
Solid State ◽  
Excimer Laser ◽  
High Power ◽  
Krf Excimer Laser

Characterization of metal surfaces irradiated by a long-pulse KrF excimer laser

1993 ◽  
Author(s):  
Th. Sarnet ◽  
J. E. Montagne ◽  
G. Inglesakis ◽  
M. Autric ◽  
L. Barrallier ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Metal Surfaces ◽  
Krf Excimer Laser ◽  
Long Pulse

Characterization of KrF excimer laser annealed PECVD SixGe1−x for MEMS post-processing

2006 ◽  
Vol 127 (2) ◽  
pp. 316-323 ◽  
Author(s):  
Sherif Sedky ◽  
Maria Gromova ◽  
Tom Van der Donck ◽  
Jean-Pierre Celis ◽  
Ann Witvrouw
Keyword(s):  
Excimer Laser ◽  
Post Processing ◽  
Krf Excimer Laser
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