Characterization of KrF excimer laser annealed PECVD SixGe1−x for MEMS post-processing

2006 ◽  
Vol 127 (2) ◽  
pp. 316-323 ◽  
Author(s):  
Sherif Sedky ◽  
Maria Gromova ◽  
Tom Van der Donck ◽  
Jean-Pierre Celis ◽  
Ann Witvrouw
Keyword(s):  
Excimer Laser ◽  
Post Processing ◽  
Krf Excimer Laser

Characterization of metal surfaces irradiated by a long‐pulse KrF excimer laser

1994 ◽  
Vol 6 (3) ◽  
pp. 149-152
Author(s):  
Th. Sarnet ◽  
J. E. Montagne ◽  
G. Inglesakis ◽  
M. Autric ◽  
L. Barrallier ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Metal Surfaces ◽  
Krf Excimer Laser ◽  
Long Pulse

Characterization of metal surfaces irradiated by a long-pulse KrF excimer laser

1993 ◽  
Author(s):  
Th. Sarnet ◽  
J. E. Montagne ◽  
G. Inglesakis ◽  
M. Autric ◽  
L. Barrallier ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Metal Surfaces ◽  
Krf Excimer Laser ◽  
Long Pulse

Characterization of fused silica ablation by F 2 -KrF excimer laser multiwavelength excitation process

2002 ◽  
Author(s):  
Kotaro Obata ◽  
Koji Sugioka ◽  
Toshimitsu Akane ◽  
Naoko Aoki ◽  
Koichi Toyoda ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Fused Silica ◽  
Excitation Process ◽  
Krf Excimer Laser

scholarly journals Characterization of Stainless Steel SUS304 Modified by KrF Excimer Laser Implant- Deposition and Its Properties after the Thermal Treatment.

1997 ◽  
Vol 25 (9) ◽  
pp. 650-653
Author(s):  
Masayuki JYUMONJI ◽  
Koji SUGIOKA ◽  
Hiroshi TAKAI ◽  
Hideo TASHIRO ◽  
Koichi TOYODA
Keyword(s):  
Stainless Steel ◽  
Thermal Treatment ◽  
Excimer Laser ◽  
Krf Excimer Laser

Pressure-Controlled Wavelength Stabilization of a KrF Excimer Laser with Narrowed Bandwidth

1989 ◽  
Vol 28 (Part 1, No. 11) ◽  
pp. 2354-2356
Author(s):  
Yasuhiro Shimada ◽  
Koichi Wani ◽  
Yoshiro Ogata
Keyword(s):  
Excimer Laser ◽  
Wavelength Stabilization ◽  
Krf Excimer Laser ◽  
Pressure Controlled
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