Adsorption and catalytic reactions on evaporated metal films. XII. Work function measurements

1966 ◽  
Vol 31 (3) ◽  
pp. 1172-1179 ◽  
Author(s):  
Z. Knor ◽  
V. Ponec
Keyword(s):  
Work Function ◽  
Metal Films ◽  
Catalytic Reactions

Thermally-Stable High Effective Work Function TaCN and Ta2N Films for pMOS Metal Gate Applications

2008 ◽  
Vol 1073 ◽  
Author(s):  
Christoph Adelmann ◽  
P. Lehnen ◽  
L.-Å. Ragnarsson ◽  
T. Conard ◽  
A. Franquet ◽  
...  
Keyword(s):  
Work Function ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Metal Films ◽  
Organic Chemical ◽  
Thermal Budget ◽  
Effective Work ◽  
Effective Work Function ◽  
Metal Organic ◽  
Spike Annealing

ABSTRACTTaCN-based metal films were grown by metal-organic chemical-vapor deposition (MOCVD) and atomic vapor-deposition (AVD). Thermal decomposition at 500ºC leads to com-positions of approximately Ta0.50C0.4N0.1 (“TaCN”), whereas a reactive process using NH3 leads to the formation of Ta0.65C0.1N0.25 (“Ta2N”) films. All films are nearly amorphous as grown and recrystallize only weakly after spike annealing at 1050°C. The thermal stability of TaCN/HfSiO4 and Ta2N/HfSiO4 stacks during spike annealing at 1050°C was studied and Si and Hf outdiffusion into TaCN or Ta2N was observed. The effective work functions of TaCN and Ta2N on HfSiO4 were found to be as high as 4.9 eV after high thermal budget. It is demonstrated that the effective work function can be further increased to 5.1 eV after high thermal budget by the insertion of a thin Al2O3 capping layer between HfSiO4 and the metal films.

Catalytic reactions of anisole and deuterium on metal films

1966 ◽  
Vol 6 (1) ◽  
pp. 82-91 ◽  
Author(s):  
R.B. Anderson ◽  
C. Kemball
Keyword(s):  
Metal Films ◽  
Catalytic Reactions

Catalytic reactions on metals studied by work function measurements

1980 ◽  
Vol 42 ◽  
pp. 141-144 ◽  
Author(s):  
Dennis Söderberg ◽  
Ingemar Lundström ◽  
Christer Svensson
Keyword(s):  
Work Function ◽  
Catalytic Reactions

The catalytic hydrogen reduction and deuterium exchange of cyclo pentanone on evaporated metal films and some observations on cyclo hexanone

1958 ◽  
Vol 246 (1247) ◽  
pp. 521-538 ◽  
Keyword(s):  
Hydrogen Reduction ◽  
Metal Films ◽  
Catalytic Reactions ◽  
Static System ◽  
Exchange Reactions ◽  
Cyclic Ketones ◽  
Reduction Processes ◽  
Similar Information ◽  
Catalytic Hydrogen ◽  
Palladium Platinum

Some catalytic reactions of cyclo pentanone vapour with hydrogen and with deuterium on evaporated metal films in a static system have been followed by means of a mass spectrometer. Hydrogenation to cyclo pentanol and hydrogenolysis with formation of cyclo pentane and cyclo pentene have been observed to different extents on films of rhodium, palladium, platinum, tungsten and nickel. Kinetic data, activation energies and frequency factors have been obtained for these reduction processes and possible mechanisms are discussed. Similar information has been obtained for the exchange reactions. An order of activity of the metals for inducing fission of the C—O bond is given. Preliminary experiments with cyclo hexanone have indicated an analogous behaviour to that found for cyclo pentanone. A comparison is drawn between the reactions of the cyclic ketones and those found for acetone (Stoddart & Kemball 1956; Kemball & Stoddart 1957).

The effects of oxygen on the work function of metal films

1977 ◽  
Vol 69 (2) ◽  
pp. 708-711 ◽  
Author(s):  
Jaroslav Müller
Keyword(s):  
Work Function ◽  
Metal Films
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