The influence of sinks of intrinsic point defects on phosphorus diffusion in Si

2002 ◽  
Vol 36 (11) ◽  
pp. 1260-1266
Author(s):  
O. V. Aleksandrov
Keyword(s):  
Point Defects ◽  
Phosphorus Diffusion ◽  
Intrinsic Point Defects

Experimental Study of Self-Diffusion in Silicon Using Isotopically Enriched Structures

1999 ◽  
Vol 568 ◽  
Author(s):  
Ant Ural ◽  
Peter B. Griffin ◽  
James D. Plummer
Keyword(s):  
Experimental Study ◽  
Experimental Evidence ◽  
Thermal Oxidation ◽  
Point Defects ◽  
Weak Dependence ◽  
Phosphorus Diffusion ◽  
Temperature Range ◽  
Intrinsic Point Defects ◽  
Self Diffusion ◽  
Fractional Contribution

ABSTRACTSelf-diffusion in silicon has been studied using epitaxially grown isotopically enriched structures under nonequilibrium concentrations of intrinsic point defects created by thermal oxidation and nitridation. Comparison of identical anneals for self, antimony, and phosphorus diffusion in silicon enables us to determine bounds on the fractional contributions of microscopic mechanisms for Si self-diffusion in the temperature range 800–1100°C. We obtain direct experimental evidence for a dual vacancy-interstitial mechanism of self-diffusion in silicon and show that the fractional contribution of each mechanism has a weak dependence on temperature.

Intrinsic point defects and charge carrier trapping in monolayer BiOX (X = I, Br, and Cl)

2021 ◽  
Author(s):  
Haixi Pan ◽  
Liping Feng ◽  
Xiaodong Zhang ◽  
Yang Chen ◽  
Gangquan Li ◽  
...  
Keyword(s):  
Charge Carrier ◽  
Point Defects ◽  
Carrier Trapping ◽  
Intrinsic Point Defects ◽  
Charge Carrier Trapping

Effect of intrinsic point defects on copper precipitation in large-diameter Czochralski silicon

2003 ◽  
Vol 83 (15) ◽  
pp. 3048-3050 ◽  
Author(s):  
Zhenqiang Xi ◽  
Deren Yang ◽  
Jin Xu ◽  
Yujie Ji ◽  
Duanlin Que ◽  
...  
Keyword(s):  
Point Defects ◽  
Large Diameter ◽  
Czochralski Silicon ◽  
Intrinsic Point Defects ◽  
Copper Precipitation

The Nature and Diffusion of Intrinsic Point Defects in SiC

2002 ◽  
Vol 389-393 ◽  
pp. 471-476 ◽  
Author(s):  
M. Bockstedte ◽  
Matthias Heid ◽  
Alexander Mattausch ◽  
Oleg Pankratov
Keyword(s):  
Point Defects ◽  
Intrinsic Point Defects ◽  
And Diffusion
Sign in / Sign up

Export Citation Format

Share Document