Inductively coupled plasmas: line widths and shapes, detection limits and spectral interferences. An integrated picture. Plenary lecture

1987 ◽  
Vol 2 (6) ◽  
pp. 513 ◽  
Author(s):  
P. W. J. M. Boumans ◽  
J. J. A. M. Vrakking
Keyword(s):  
Detection Limits ◽  
Plenary Lecture ◽  
Inductively Coupled Plasmas ◽  
Spectral Interferences ◽  
Inductively Coupled ◽  
Line Widths ◽  
Coupled Plasmas

Fundamental description of spectrochemical inductively coupled plasmas. Plenary lecture

1996 ◽  
Vol 11 (9) ◽  
pp. 623 ◽  
Author(s):  
D. C. Schram ◽  
J. A. M. van der Mullen ◽  
J. M. de Regt ◽  
D. A. Benoy ◽  
F. H. A. G. Fey ◽  
...  
Keyword(s):  
Plenary Lecture ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

scholarly journals Erratum: Power Matching to Pulsed Inductively Coupled Plasmas [J. Appl. Phys. 127, 133302 (2020)]

2020 ◽  
Vol 128 (8) ◽  
pp. 089901
Author(s):  
Chenhui Qu ◽  
Steven J. Lanham ◽  
Steven C. Shannon ◽  
Sang Ki Nam ◽  
Mark J. Kushner
Keyword(s):  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Power Matching ◽  
Coupled Plasmas

Etching characteristics of ZnO thin films in chlorine-containing inductively coupled plasmas

2006 ◽  
Vol 83 (2) ◽  
pp. 328-335 ◽  
Author(s):  
S.W. Na ◽  
M.H. Shin ◽  
Y.M. Chung ◽  
J.G. Han ◽  
S.H. Jeung ◽  
...  
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas
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