The new test pattern selection method for OPC model calibration, based on the process of clustering in a hybrid space

Author(s):  
Dmitry Vengertsev ◽  
Kihyun Kim ◽  
Seung-Hune Yang ◽  
Seongbo Shim ◽  
Seongho Moon ◽  
...  
Author(s):  
Yoshinobu Higami ◽  
Hiroshi Furutani ◽  
Takao Sakai ◽  
Shuichi Kameyama ◽  
Hiroshi Takahashi

Author(s):  
Yen-Tzu Lin ◽  
Osei Poku ◽  
Naresh K. Bhatti ◽  
R. D. (Shawn) Blanton

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