Characterization of a Real-time Confocal Scanning Optical Microscope

1989 ◽  
Author(s):  
T. R. Corle ◽  
G. Q. Xiao ◽  
G. S. Kino ◽  
N. S. Levine
Keyword(s):  
Real Time ◽  
Optical Microscope ◽  
Confocal Scanning ◽  
Confocal Scanning Optical Microscope

Multilevel CD/overlay metrology using a real-time confocal scanning optical microscope

1990 ◽  
Vol 11 (1-4) ◽  
pp. 669-674 ◽  
Author(s):  
N.S. Levine ◽  
T.R. Corle ◽  
R.T. Mumaw ◽  
C-H Chou ◽  
G.S. Kino
Keyword(s):  
Real Time ◽  
Optical Microscope ◽  
Confocal Scanning ◽  
Confocal Scanning Optical Microscope

Real‐time confocal scanning optical microscope

1988 ◽  
Vol 53 (8) ◽  
pp. 716-718 ◽  
Author(s):  
G. Q. Xiao ◽  
T. R. Corle ◽  
G. S. Kino
Keyword(s):  
Real Time ◽  
Optical Microscope ◽  
Confocal Scanning ◽  
Confocal Scanning Optical Microscope
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