confocal scanning optical microscope
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A MEMS Non-interferometric Differential Confocal Scanning Optical Microscope

2001 ◽  
pp. 590-593 ◽  
Author(s):  
W. Piyawattanametha ◽  
P. R. Patterson ◽  
G. D. J. Su ◽  
H. Toshiyoshi ◽  
M. C. Wu
Keyword(s):  
Optical Microscope ◽  
Confocal Scanning ◽  
Confocal Scanning Optical Microscope

Assessment of surface geometry using confocal scanning optical microscope

Mechatronics ◽  
1998 ◽  
Vol 8 (3) ◽  
pp. 187-215 ◽  
Author(s):  
Ganesha Udupa ◽  
M. Singaperumal ◽  
R.S. Sirohi ◽  
M.P. Kothiyal
Keyword(s):  
Optical Microscope ◽  
Surface Geometry ◽  
Confocal Scanning ◽  
Confocal Scanning Optical Microscope

Imaging of spheres with the confocal scanning optical microscope

1996 ◽  
Vol 21 (22) ◽  
pp. 1800 ◽  
Author(s):  
Wieland Weise ◽  
Pavel Zinin ◽  
Tony Wilson ◽  
Andrew Briggs ◽  
Siegfried Boseck
Keyword(s):  
Optical Microscope ◽  
Confocal Scanning ◽  
Confocal Scanning Optical Microscope

Confocal Scanning Optical Microscope and its Use for Surface Profiling

1994 ◽  
Vol 23 (4) ◽  
pp. 163-171
Author(s):  
B. S. Chauhan ◽  
K. Thirumalaivelu ◽  
M. P. Kothiyal ◽  
R. S. Sirohi
Keyword(s):  
Optical Microscope ◽  
Surface Profiling ◽  
Confocal Scanning ◽  
Confocal Scanning Optical Microscope
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