Comparison Of Electron Beam And Optical Projection Lithography In The Region Of One Micrometer

1981 ◽  
Author(s):  
T. S. Chang ◽  
D. F. Kyser ◽  
C. H. Ting
Keyword(s):  
Electron Beam ◽  
Projection Lithography ◽  
Optical Projection

Development of data conversion system for electron beam projection lithography

2002 ◽  
Vol 20 (6) ◽  
pp. 2672 ◽  
Author(s):  
Kokoro Kato ◽  
Kuninori Nishizawa ◽  
Tamae Haruki ◽  
Tadao Inoue ◽  
Koichi Kamijo ◽  
...  
Keyword(s):  
Electron Beam ◽  
Data Conversion ◽  
Projection Lithography ◽  
Conversion System ◽  
Beam Projection

New mask format for low-energy electron-beam proximity projection lithography

2002 ◽  
Author(s):  
Kaoru Koike ◽  
Shinji Omori ◽  
Kazuya Iwase ◽  
Isao Ashida ◽  
Shigeru Moriya
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Projection Lithography ◽  
Low Energy Electron

A Comparison Of The Optical Projection Lithography Simulators In Sample And Prolith

1990 ◽  
Author(s):  
O. D. Crisalle ◽  
S. R. Keifling ◽  
D. E. Seborg ◽  
D. A. Mellichamp
Keyword(s):  
Projection Lithography ◽  
Optical Projection

scholarly journals A Robust Computational Algorithm for Inverse Photomask Synthesis in Optical Projection Lithography

2012 ◽  
Vol 5 (2) ◽  
pp. 625-651 ◽  
Author(s):  
Siu Kai Choy ◽  
Ningning Jia ◽  
Chong Sze Tong ◽  
Man Lai Tang ◽  
Edmund Y. Lam
Keyword(s):  
Computational Algorithm ◽  
Projection Lithography ◽  
Optical Projection
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