Spatial light modulator for maskless optical projection lithography

2006 ◽  
Vol 24 (6) ◽  
pp. 2852 ◽  
Author(s):  
G. P. Watson ◽  
V. Aksyuk ◽  
M. E. Simon ◽  
D. M. Tennant ◽  
R. A. Cirelli ◽  
...  
Keyword(s):  
Spatial Light Modulator ◽  
Light Modulator ◽  
Projection Lithography ◽  
Optical Projection

A high-end mask writer using a spatial light modulator

2005 ◽  
Author(s):  
Ulric B. Ljungblad ◽  
Per Askebjer ◽  
Tord Karlin ◽  
Tor Sandstrom ◽  
Henrik Sjoeberg
Keyword(s):  
Spatial Light Modulator ◽  
Light Modulator

Generation of vector beams array with a single spatial light modulator

2021 ◽  
pp. 126915
Author(s):  
Lijiao Guo ◽  
Zhiqing Feng ◽  
Yating Fu ◽  
Changjun Min
Keyword(s):  
Spatial Light Modulator ◽  
Light Modulator ◽  
Vector Beams

scholarly journals Phase-only transmissive spatial light modulator based on tunable dielectric metasurface

Science ◽  
2019 ◽  
Vol 364 (6445) ◽  
pp. 1087-1090 ◽  
Author(s):  
Shi-Qiang Li ◽  
Xuewu Xu ◽  
Rasna Maruthiyodan Veetil ◽  
Vytautas Valuckas ◽  
Ramón Paniagua-Domínguez ◽  
...  
Keyword(s):  
High Resolution ◽  
Spatial Light Modulator ◽  
Deflection Angle ◽  
Beam Steering ◽  
Beam Deflection ◽  
Spatial Light Modulators ◽  
Light Modulator ◽  
Steering Angle ◽  
Holographic Display ◽  
Light Modulators

Rapidly developing augmented reality, solid-state light detection and ranging (LIDAR), and holographic display technologies require spatial light modulators (SLMs) with high resolution and viewing angle to satisfy increasing customer demands. Performance of currently available SLMs is limited by their large pixel sizes on the order of several micrometers. Here, we propose a concept of tunable dielectric metasurfaces modulated by liquid crystal, which can provide abrupt phase change, thus enabling pixel-size miniaturization. We present a metasurface-based transmissive SLM, configured to generate active beam steering with >35% efficiency and a large beam deflection angle of 11°. The high resolution and steering angle obtained provide opportunities to develop the next generation of LIDAR and display technologies.

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