Residual layer thickness control and metrology in jet and flash imprint lithography

2012 ◽  
Author(s):  
Shrawan Singhal ◽  
Ravikiran Attota ◽  
S. V. Sreenivasan
Keyword(s):  
Layer Thickness ◽  
Residual Layer ◽  
Imprint Lithography ◽  
Thickness Control

Residual layer thickness in nanoimprint: Experiments and coarse-grain simulation

2008 ◽  
Vol 85 (5-6) ◽  
pp. 846-849 ◽  
Author(s):  
Nikolaos Kehagias ◽  
Vincent Reboud ◽  
Clivia M. Sotomayor Torres ◽  
Vadim Sirotkin ◽  
Alexander Svintsov ◽  
...  
Keyword(s):  
Layer Thickness ◽  
Residual Layer ◽  
Coarse Grain

Effect of initial resist thickness on residual layer thickness of nanoimprinted structures

2005 ◽  
Vol 23 (6) ◽  
pp. 3023 ◽  
Author(s):  
Hae-Jeong Lee ◽  
Hyun Wook Ro ◽  
Christopher L. Soles ◽  
Ronald L. Jones ◽  
Eric K. Lin ◽  
...  
Keyword(s):  
Layer Thickness ◽  
Residual Layer

Controlled airbrush coating of polymer resists in Roll-to-Roll nanoimprinting with regimented residual layer thickness

2016 ◽  
Vol 17 (7) ◽  
pp. 943-947 ◽  
Author(s):  
Sungkwan Koo ◽  
Sung Ho Lee ◽  
Jeong Dae Kim ◽  
Jung Goo Hong ◽  
Hyoung Won Baac ◽  
...  
Keyword(s):  
Layer Thickness ◽  
Residual Layer ◽  
Roll To Roll
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