Liquid transfer imprint lithography: A new route to residual layer thickness control

2011 ◽  
Vol 29 (6) ◽  
pp. 06FC12 ◽  
Author(s):  
Namil Koo ◽  
Jung Wuk Kim ◽  
Martin Otto ◽  
Christian Moormann ◽  
Heinrich Kurz
Keyword(s):  
Layer Thickness ◽  
Residual Layer ◽  
Imprint Lithography ◽  
Thickness Control ◽  
Liquid Transfer

Residual layer thickness in nanoimprint: Experiments and coarse-grain simulation

2008 ◽  
Vol 85 (5-6) ◽  
pp. 846-849 ◽  
Author(s):  
Nikolaos Kehagias ◽  
Vincent Reboud ◽  
Clivia M. Sotomayor Torres ◽  
Vadim Sirotkin ◽  
Alexander Svintsov ◽  
...  
Keyword(s):  
Layer Thickness ◽  
Residual Layer ◽  
Coarse Grain

Effect of initial resist thickness on residual layer thickness of nanoimprinted structures

2005 ◽  
Vol 23 (6) ◽  
pp. 3023 ◽  
Author(s):  
Hae-Jeong Lee ◽  
Hyun Wook Ro ◽  
Christopher L. Soles ◽  
Ronald L. Jones ◽  
Eric K. Lin ◽  
...  
Keyword(s):  
Layer Thickness ◽  
Residual Layer
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