Fabrication of templates with rectangular bits on circular tracks by combining block copolymer directed self-assembly and nanoimprint lithography
2012 ◽
Vol 11
(3)
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pp. 031405-1
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2012 ◽
Vol 22
(41)
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pp. 21871
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Keyword(s):
2014 ◽
Vol 52
(11)
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pp. 789-789
2013 ◽
Vol 52
(5)
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pp. 361-367
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2015 ◽
Vol 25
(22)
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pp. 3425-3432
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2005 ◽
Vol 42
(3)
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pp. 180-183
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Keyword(s):