Characterizing post-exposure bake processing for transient- and steady-state conditions in the context of critical dimension control

2002 ◽  
Author(s):  
David A. Steele ◽  
Anthony Coniglio ◽  
Cherry Tang ◽  
Bhanwar Singh ◽  
Steve Nip ◽  
...  
Keyword(s):  
Steady State ◽  
Critical Dimension ◽  
Post Exposure ◽  
Dimension Control ◽  
Post Exposure Bake ◽  
Transient And Steady State

Spectroscopic ellipsometric scatterometry: sources of errors in critical dimension control

2003 ◽  
Author(s):  
Jerome Hazart ◽  
Gilles Grand ◽  
Philippe Thony ◽  
David Herisson ◽  
Stephanie Garcia ◽  
...  
Keyword(s):  
Critical Dimension ◽  
Dimension Control

Modeling of assembly systems with complex structures for throughput analysis during transients

2019 ◽  
Vol 39 (2) ◽  
pp. 262-271
Author(s):  
Yukan Hou ◽  
Yuan Li ◽  
Yuntian Ge ◽  
Jie Zhang ◽  
Shoushan Jiang
Keyword(s):  
Steady State ◽  
Fixed Point Theory ◽  
Point Theory ◽  
Assembly Systems ◽  
Complex Structures ◽  
Throughput Performance ◽  
Throughput Analysis ◽  
Content Type ◽  
Serial Production Lines ◽  
Transient And Steady State

Purpose The purpose of this paper is to present an analytical method for throughput analysis of assembly systems with complex structures during transients. Design/methodology/approach Among the existing studies on the performance evaluation of assembly systems, most focus on the system performance in steady state. Inspired by the transient analysis of serial production lines, the state transition matrix is derived considering the characteristics of merging structure in assembly systems. The system behavior during transients is described by an ergodic Markov chain, with the states being the occupancy of all buffers. The dynamic model for the throughput analysis is solved using the fixed-point theory. Findings This method can be used to predict and evaluate the throughput performance of assembly systems in both transient and steady state. By comparing the model calculation results with the simulation results, this method is proved to be accurate. Originality/value This proposed modeling method can depict the throughput performance of assembly systems in both transient and steady state, whereas most exiting methods can be used for only steady-state analysis. In addition, this method shows the potential for the analysis of complex structured assembly systems owing to the low computational complexity.

A novel post exposure bake technique to improve CD uniformity over product wafers

2005 ◽  
Author(s):  
Tomoyuki Takeishi ◽  
K. Hayasaki ◽  
Tsuyoshi Shibata
Keyword(s):  
Post Exposure ◽  
Post Exposure Bake

scholarly journals Some comments on transient and steady-state reconnection at the dayside magnetopause

2000 ◽  
Vol 27 (9) ◽  
pp. 1359-1362 ◽  
Author(s):  
Alan S. Rodger ◽  
Iain J. Coleman ◽  
Mike Pinnock
Keyword(s):  
Steady State ◽  
Dayside Magnetopause ◽  
Transient And Steady State
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