Measurement of absolute optical thickness distribution of a mask-glass by wavelength tuning interferometry

Author(s):  
Kenichi Hibino ◽  
Kim Yangjin ◽  
Youichi Bitou ◽  
Sonko Ohsawa ◽  
Naohiko Sugita ◽  
...  
2010 ◽  
Vol 76 (2) ◽  
pp. 243-248
Author(s):  
Yangjin KIM ◽  
Kenichi HIBINO ◽  
Youichi BITOU ◽  
Sonko OSAWA ◽  
Naohiko SUGITA ◽  
...  

2009 ◽  
Vol 107 (3) ◽  
pp. 394-398
Author(s):  
A. M. Goncharenko ◽  
G. V. Sinitsyn ◽  
A. V. Lyakhnovich ◽  
S. P. Apanasevich

2011 ◽  
Author(s):  
Kenichi Hibino ◽  
Yangjin Kim ◽  
Youichi Bitou ◽  
Mamoru Mitsuishi

2000 ◽  
Vol 105 (D14) ◽  
pp. 17853-17873 ◽  
Author(s):  
Toshihiko Takemura ◽  
Hajime Okamoto ◽  
Yoshihiro Maruyama ◽  
Atusi Numaguti ◽  
Akiko Higurashi ◽  
...  

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