Design of a large area 2D microscopy image measurement system

Author(s):  
Xin Li ◽  
Yurong Chen ◽  
Shenghuai Wang ◽  
Tiebang Xie
2011 ◽  
Vol 131 (2) ◽  
pp. 320-328 ◽  
Author(s):  
Cunwei Lu ◽  
Hiroya Kamitomo ◽  
Ke Sun ◽  
Kazuhiro Tsujino ◽  
Genki Cho

2020 ◽  
Vol 10 (4) ◽  
pp. 1536
Author(s):  
Fang Cheng ◽  
Jingwu Zou ◽  
Hang Su ◽  
Yin Wang ◽  
Qing Yu

In this paper, a novel design of a surface topography measurement system is proposed, to address the challenge of accurate measurement in a relatively large area. This system was able to achieve nanometer-scale accuracy in a measurement range of 100 mm × 100 mm. The high accuracy in a relatively large area was achieved by implementing two concepts: (1) A static coordinate system was configured to minimize the Abbe errors. (2) A differential measurement configuration was developed by setting up a confocal sensor and a film interferometry module to separate the motion error. In order to accommodate the differential measurement probes from both sides of the central stage and ensure the system rigidity with balanced supports, separate linear guides were introduced in this system. Therefore, the motion Degree of Freedom (DoF) was analyzed in order to address the challenge of an over-constrained mechanism due to multiple kinematic pairs. An optimal configuration and a quick assembly process were proposed accordingly. The experimental results presented in this paper showed that the proposed modular measurement system was able to achieve 10 nm accuracy in measuring the surface roughness and 100 nm accuracy in measuring the step height in the range of 100 mm × 100 mm. In summary, the novel concept of this study is the build of a high-accuracy system with conventional mechanical components.


2010 ◽  
Vol 43 (26) ◽  
pp. 274-278
Author(s):  
Takahiro KOIKE ◽  
Yuichi OGAWA ◽  
Naoshi KONDO ◽  
Noriko TAKAHASHI ◽  
Mitsuru TANIWAKI ◽  
...  

1994 ◽  
Author(s):  
Ronald M. Martino ◽  
Richard A. Ferguson ◽  
Russell A. Budd ◽  
John L. Staples ◽  
Lars W. Liebmann ◽  
...  

2015 ◽  
Vol 764-765 ◽  
pp. 1324-1328
Author(s):  
Pen Han Chen ◽  
Chien Hung Liu ◽  
Yu Fen Chen ◽  
Hung Sheng Chiu ◽  
Yu Chi Liu

This paper integrated a laser triangulation probe with a two-dimensional image measurement system to measure the height of an object using the auto-focusing method. In the laser triangulation probe, the laser diode was used as the light source and one-dimensional position sensitive detector was adopted to receive the position of the laser spots to detect the height. The laser triangulation probe was used for small height measurement and the auto-focusing method was used for large height measurement. Two standard gauges with thicknesses of 8mm and 8.5mm were used to verify our proposed method. With height difference of 500μm, the experiment results showed the measuring error was within ±3μm and standard deviation was about 0.1μm.


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