Mask inspection system with variable sensitivity and printability verification function

2010 ◽  
Author(s):  
Takafumi Inoue ◽  
Kenichi Takahara ◽  
Hideo Tsuchiya ◽  
Masakazu Tokita ◽  
Tadao Inoue ◽  
...  
Keyword(s):  
Inspection System ◽  
Variable Sensitivity ◽  
Mask Inspection

An automated mask inspection system—AMIS

1975 ◽  
Vol 22 (7) ◽  
pp. 487-495 ◽  
Author(s):  
J.H. Bruning ◽  
M. Feldman ◽  
T.S. Kinsel ◽  
E.K. Sittig ◽  
R.L. Townsend
Keyword(s):  
Inspection System ◽  
Mask Inspection

Printability verification function of mask inspection system

2009 ◽  
Author(s):  
Hideo Tsuchiya ◽  
Masaki Yamabe ◽  
Masakazu Tokita ◽  
Kenichi Takahara ◽  
Kinya Usuda ◽  
...  
Keyword(s):  
Inspection System ◽  
Mask Inspection

Current status of EUV mask inspection using 193nm optical inspection system in 30nm node and beyond

2011 ◽  
Author(s):  
Sang Hoon Han ◽  
Jihoon Na ◽  
Wonil Cho ◽  
Dong Hoon Chung ◽  
Chan-Uk Jeon ◽  
...  
Keyword(s):  
Current Status ◽  
Inspection System ◽  
Optical Inspection ◽  
Mask Inspection ◽  
Optical Inspection System

Electron beam EUV patterned mask inspection system

2011 ◽  
Author(s):  
Keizo Yamada ◽  
Yasunobu Kitayama ◽  
Peter Fiekowsky
Keyword(s):  
Electron Beam ◽  
Inspection System ◽  
Mask Inspection

EUV patterned mask inspection system using a projection electron microscope technique

2013 ◽  
Author(s):  
Hidehiro Watanabe ◽  
Ryoichi Hirano ◽  
Susumu Iida ◽  
Tsuyoshi Amano ◽  
Tsuneo Terasawa ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Inspection System ◽  
Microscope Technique ◽  
Mask Inspection

Image sensing method and defect detection algorithm for a 256-Mb and 1-Gb DRAM mask inspection system

1997 ◽  
Author(s):  
Hiromu Inoue ◽  
Kentaro Okuda ◽  
Takehiko Nomura ◽  
Hideo Tsuchiya ◽  
Mitsuo Tabata
Keyword(s):  
Defect Detection ◽  
Detection Algorithm ◽  
Inspection System ◽  
Image Sensing ◽  
Mask Inspection

Mask data rank and printability verification function of mask inspection system

2010 ◽  
Author(s):  
Kenichi Takahara ◽  
Masakazu Tokita ◽  
Hideo Tsuchiya ◽  
Masaki Yamabe ◽  
Nobutaka Kikuiri ◽  
...  
Keyword(s):  
Inspection System ◽  
Mask Inspection
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