Electron beam EUV patterned mask inspection system

2011 ◽  
Author(s):  
Keizo Yamada ◽  
Yasunobu Kitayama ◽  
Peter Fiekowsky
Keyword(s):  
Electron Beam ◽  
Inspection System ◽  
Mask Inspection

Mask inspection method using the electron-beam inspection system based on projection electron microscopy

2006 ◽  
Author(s):  
Atsushi Onishi ◽  
Ichirota Nagahama ◽  
Yuichiro Yamazaki ◽  
Nobuharu Noji ◽  
Toru Kaga ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Electron Beam ◽  
Inspection System ◽  
Inspection Method ◽  
Mask Inspection

Application of the SEMSpec electron-beam inspection system to in-process defect detection on semiconductor wafers

1996 ◽  
Vol 30 (1-4) ◽  
pp. 567-570 ◽  
Author(s):  
T.R. Cass ◽  
D. Hendricks ◽  
J. Jau ◽  
H.J. Dohse ◽  
A.D. Brodie ◽  
...  
Keyword(s):  
Electron Beam ◽  
Defect Detection ◽  
Inspection System

EPL stencil mask defect inspection system using transmission electron beam

2003 ◽  
Author(s):  
Jiro Yamamoto ◽  
Teruo Iwasaki ◽  
Masaki Yamabe ◽  
Norimichi Anazawa ◽  
Satoru Maruyama ◽  
...  
Keyword(s):  
Electron Beam ◽  
Inspection System ◽  
Defect Inspection ◽  
Transmission Electron ◽  
Stencil Mask

An automated mask inspection system—AMIS

1975 ◽  
Vol 22 (7) ◽  
pp. 487-495 ◽  
Author(s):  
J.H. Bruning ◽  
M. Feldman ◽  
T.S. Kinsel ◽  
E.K. Sittig ◽  
R.L. Townsend
Keyword(s):  
Inspection System ◽  
Mask Inspection

Demonstration of defect free EUV mask for 22nm NAND flash contact layer using electron beam inspection system

2011 ◽  
Author(s):  
Takeya Shimomura ◽  
Satoshi Kawashima ◽  
Yuichi Inazuki ◽  
Tsukasa Abe ◽  
Tadahiko Takikawa ◽  
...  
Keyword(s):  
Electron Beam ◽  
Contact Layer ◽  
Inspection System ◽  
Nand Flash

Printability verification function of mask inspection system

2009 ◽  
Author(s):  
Hideo Tsuchiya ◽  
Masaki Yamabe ◽  
Masakazu Tokita ◽  
Kenichi Takahara ◽  
Kinya Usuda ◽  
...  
Keyword(s):  
Inspection System ◽  
Mask Inspection

Native pattern defect inspection of EUV mask using advanced electron beam inspection system

2010 ◽  
Author(s):  
Takeya Shimomura ◽  
Yuichi Inazuki ◽  
Tsukasa Abe ◽  
Tadahiko Takikawa ◽  
Hiroshi Mohri ◽  
...  
Keyword(s):  
Electron Beam ◽  
Inspection System ◽  
Defect Inspection
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