Optical design, performance, and tolerancing of next-generation airborne imaging spectrometers

2010 ◽  
Author(s):  
Holly A. Bender ◽  
Pantazis Z. Mouroulis ◽  
Robert O. Green ◽  
Daniel W. Wilson
Keyword(s):  
Optical Design ◽  
Next Generation ◽  
Design Performance ◽  
Airborne Imaging

The optical design of GMOX: a next-generation instrument concept for Gemini

2016 ◽  
Author(s):  
Robert Barkhouser ◽  
Massimo Robberto ◽  
Stephen A. Smee ◽  
Zoran Ninkov ◽  
Mario Gennaro ◽  
...  
Keyword(s):  
Optical Design ◽  
Next Generation

RapidNano: Towards 20nm Particle Detection on EUV Mask Blanks

MRS Advances ◽  
2016 ◽  
Vol 1 (31) ◽  
pp. 2225-2236 ◽  
Author(s):  
Jacques van der Donck ◽  
Peter Bussink ◽  
Erik Fritz ◽  
Peter van der Walle
Keyword(s):  
Particle Size ◽  
Signal To Noise Ratio ◽  
Semiconductor Industry ◽  
Optical Design ◽  
Dark Field ◽  
Detection Methods ◽  
Next Generation ◽  
Large Area ◽  
Dark Field Imaging ◽  
20 Nm

ABSTRACTCleanliness is a prerequisite for obtaining economically feasible yield levels in the semiconductor industry. For the next generation of lithographic equipment, EUV lithography, the size of yield-loss inducing particles for the masks will be smaller than 20 nm. Consequently, equipment for handling EUV masks should not add particles larger than 20 nm. Detection methods for 20 nm particles on large area surfaces are needed to qualify the equipment for cleanliness. Detection of 20 nm particles is extremely challenging, not only because of the particle size, but also because of the large surface area and limited available time.In 2002 TNO developed the RapidNano, a platform that is capable of detecting nanoparticles on flat substrates. Over the last decade, the smallest detectable particle size was decreased while the inspection rate was increased. This effort has led to a stable and affordable detection platform that is capable of inspecting the full surface of a mask blank.The core of RapidNano is a dark-field imaging technique. Every substrate type has a typical background characteristic, which strongly affects the size of the smallest detectable particle. The noise level is induced by the speckle generated by the surface roughness of the mask. The signal-to-noise ratio can be improved by illuminating the inspection area from nine different angles. This improvement was first shown on test bench level and then applied in the RapidNano3. The RapidNano3 is capable of detecting 42nm latex sphere equivalents (and larger) on silicon surfaces. RapidNano4, the next generation, will use 193 nm light and the same nine angle illumination mode. Camera sensitivity and available laser power determine the achievable throughput. Therefore, special care was given to the optical design, particularly the optical path. With RapidNano4, TNO will push the detection limit of defects on EUV blanks to below 20nm.

Lessons learned in the optical design of the Next-Generation Space Telescope

1998 ◽  
Author(s):  
James B. Hadaway ◽  
Mark E. Wilson ◽  
David C. Redding ◽  
Robert A. Woodruff
Keyword(s):  
Optical Design ◽  
Lessons Learned ◽  
Next Generation ◽  
Space Telescope

MOSAIC optical relay module: optical design, performance, and flexure analysis

2018 ◽  
Author(s):  
Ariadna Calcines ◽  
Marc Dubbeldam ◽  
Timothy J. Morris ◽  
Ewan Fitzsimons ◽  
Hermine Schnetler ◽  
...  
Keyword(s):  
Optical Design ◽  
Design Performance

Optical design and modelling of the QUBIC instrument, a next-generation quasi-optical bolometric interferometer for cosmology

2016 ◽  
Author(s):  
S. Scully ◽  
D. Burke ◽  
C. O'Sullivan ◽  
D. Gayer ◽  
M. Gradziel ◽  
...  
Keyword(s):  
Optical Design ◽  
Next Generation

scholarly journals Koci drill for drilling in ice, sand and rock: drill requirements, design, performance, difficulties

2007 ◽  
Vol 47 ◽  
pp. 105-108 ◽  
Author(s):  
J. Green ◽  
B. Koci ◽  
J. Kyne
Keyword(s):  
Field Performance ◽  
Ice Cores ◽  
Maximum Depth ◽  
Dry Valleys ◽  
Next Generation ◽  
Design Performance ◽  
Rock Drill ◽  
New Man ◽  
Acceptable Quality ◽  
Field Season

AbstractA new man-portable drill designed to perform in ice with entrained sand and rock has been built. Designated the ‘Koci drill’, it was first used on rock-covered glaciers in the McMurdo Dry Valleys, Antarctica, during the 2006/07 field season. This drill is designed to be disassembled into component parts no heavier than 30 kg (not including the generator). For stability, the drill platform weight can be augmented with available rock. The field performance of the drill was generally good and both ice and rock were successfully penetrated and acceptable-quality ice cores up to 1 m long were collected during the 2007/08 season. The maximum depth achieved was 10.25 m. Given a concentrated effort at one or two sites per season, a depth of 40 m is achievable. Problems encountered in the field will be addressed in the next-generation design.

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