Plasma parameters and active particles kinetics in HBr dc glow discharges

2009 ◽  
Author(s):  
A. Smirnov ◽  
A. Efremov ◽  
V. Svettsov ◽  
A. Islyaykin
Keyword(s):  
Plasma Parameters ◽  
Active Particles ◽  
Glow Discharges

scholarly journals Electrical glow discharges and plasma parameter of planar sputtering system for silver target

2018 ◽  
Vol 16 (37) ◽  
pp. 65-72
Author(s):  
Mazin H. Hasan
Keyword(s):  
Breakdown Voltage ◽  
Uniform Electric Field ◽  
Plasma Parameters ◽  
Argon Gas ◽  
Glow Discharges ◽  
Current Voltage ◽  
Paschen Curve ◽  
Silver Target ◽  
Current Voltage Characteristics ◽  
Sputtering System

DC planar sputtering system is characterized by varying discharge potential of (250-2000 volt) and Argon gas pressures of (3.5×10-2 – 1.5) mbar. The breakdown voltage for silver electrode was studied with a uniform electric field at different discharge distances, as well as plasma parameters. The breakdown voltage is a product of the Argon gas pressure inside the chamber and gab distance between the electrodes, represent as Paschen curve. The Current-voltage characteristics curves indicate that the electrical discharge plasma is working in the abnormal glow region. Plasma parameters were found from the current-voltage characteristics of a single probe positioned at the inter-cathode space. Typical values of the electron temperature and the electron density are in the range of (2.93 –5.3) eV and (10-16 -10-17) m-3 respectively.

A comparative study of plasma parameters and gas phase compositions in Cl2 and HCl direct current glow discharges

2008 ◽  
Vol 516 (10) ◽  
pp. 3020-3027 ◽  
Author(s):  
A.M. Efremov ◽  
V.I. Svettsov ◽  
D.V. Sitanov ◽  
D.I. Balashov
Keyword(s):  
Comparative Study ◽  
Gas Phase ◽  
Direct Current ◽  
Plasma Parameters ◽  
Glow Discharges

Plasma Parameters and Kinetics of Active Particles in the Mixture CHF3 + O2 + Ar

2020 ◽  
Vol 49 (4) ◽  
pp. 233-243
Author(s):  
A. M. Efremov ◽  
D. B. Murin ◽  
K.-H. Kwon
Keyword(s):  
Plasma Parameters ◽  
Active Particles ◽  
Kinetics Of
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