Plasma parameters of MSE sustained high pressure glow discharges

2002 ◽  
Author(s):  
C. Penache ◽  
A. Braeuning-Demian ◽  
M. Miclea ◽  
U. Ernst ◽  
D. Penache ◽  
...  
Keyword(s):  
High Pressure ◽  
Plasma Parameters ◽  
Glow Discharges

Microdischarge-assisted ignition of dielectric-barrier high-pressure glow discharges

2006 ◽  
Vol 88 (2) ◽  
pp. 021502 ◽  
Author(s):  
Jichul Shin ◽  
Laxminarayan L. Raja
Keyword(s):  
High Pressure ◽  
Dielectric Barrier ◽  
Glow Discharges

scholarly journals Electrical glow discharges and plasma parameter of planar sputtering system for silver target

2018 ◽  
Vol 16 (37) ◽  
pp. 65-72
Author(s):  
Mazin H. Hasan
Keyword(s):  
Breakdown Voltage ◽  
Uniform Electric Field ◽  
Plasma Parameters ◽  
Argon Gas ◽  
Glow Discharges ◽  
Current Voltage ◽  
Paschen Curve ◽  
Silver Target ◽  
Current Voltage Characteristics ◽  
Sputtering System

DC planar sputtering system is characterized by varying discharge potential of (250-2000 volt) and Argon gas pressures of (3.5×10-2 – 1.5) mbar. The breakdown voltage for silver electrode was studied with a uniform electric field at different discharge distances, as well as plasma parameters. The breakdown voltage is a product of the Argon gas pressure inside the chamber and gab distance between the electrodes, represent as Paschen curve. The Current-voltage characteristics curves indicate that the electrical discharge plasma is working in the abnormal glow region. Plasma parameters were found from the current-voltage characteristics of a single probe positioned at the inter-cathode space. Typical values of the electron temperature and the electron density are in the range of (2.93 –5.3) eV and (10-16 -10-17) m-3 respectively.

Modeling the chemical kinetics of high-pressure glow discharges in mixtures of helium with real air

2006 ◽  
Vol 99 (9) ◽  
pp. 093301 ◽  
Author(s):  
K. R. Stalder ◽  
R. J. Vidmar ◽  
G. Nersisyan ◽  
W. G. Graham
Keyword(s):  
High Pressure ◽  
Chemical Kinetics ◽  
Glow Discharges ◽  
Kinetics Of

scholarly journals Direct current high-pressure glow discharges

1999 ◽  
Vol 85 (4) ◽  
pp. 2075-2080 ◽  
Author(s):  
Robert H. Stark ◽  
Karl H. Schoenbach
Keyword(s):  
High Pressure ◽  
Direct Current ◽  
Glow Discharges

A comparative study of plasma parameters and gas phase compositions in Cl2 and HCl direct current glow discharges

2008 ◽  
Vol 516 (10) ◽  
pp. 3020-3027 ◽  
Author(s):  
A.M. Efremov ◽  
V.I. Svettsov ◽  
D.V. Sitanov ◽  
D.I. Balashov
Keyword(s):  
Comparative Study ◽  
Gas Phase ◽  
Direct Current ◽  
Plasma Parameters ◽  
Glow Discharges

Plasma parameters and active particles kinetics in HBr dc glow discharges

2009 ◽  
Author(s):  
A. Smirnov ◽  
A. Efremov ◽  
V. Svettsov ◽  
A. Islyaykin
Keyword(s):  
Plasma Parameters ◽  
Active Particles ◽  
Glow Discharges

Hydrodynamic approximation for ions in high-pressure rf glow discharges

1995 ◽  
Vol 51 (1) ◽  
pp. 811-812
Author(s):  
V. Halpern ◽  
E. V. Kharitonov
Keyword(s):  
High Pressure ◽  
Hydrodynamic Approximation ◽  
Glow Discharges
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