scholarly journals Mask roughness and its implications for LER at the 22- and 16nm nodes

2010 ◽  
Author(s):  
Patrick P. Naulleau ◽  
Simi A. George ◽  
Brittany M. McClinton
Keyword(s):  
Mask Roughness

Mitigating mask roughness via pupil filtering

2014 ◽  
Author(s):  
B. Baylav ◽  
C. Maloney ◽  
Z. Levinson ◽  
J. Bekaert ◽  
A. Vaglio Pret ◽  
...  
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Mask Roughness

Predicting LER PSD caused by mask roughness using a mathematical model

2014 ◽  
Author(s):  
Rene A. Claus ◽  
Andrew R. Neureuther ◽  
Laura Waller ◽  
Patrick P. Naulleau
Keyword(s):  
Mathematical Model ◽  
Mask Roughness

scholarly journals Mask roughness challenges in extreme ultraviolet mask development

2011 ◽  
Vol 29 (6) ◽  
pp. 06F501 ◽  
Author(s):  
Patrick Naulleau ◽  
Brittany McClinton ◽  
Kenneth A. Goldberg ◽  
Iacopo Mochi ◽  
Abbas Rastegar
Keyword(s):  
Extreme Ultraviolet ◽  
Mask Roughness

Impact of pupil plane filtering on mask roughness transfer

2013 ◽  
Vol 31 (6) ◽  
pp. 06F801 ◽  
Author(s):  
Burak Baylav ◽  
Chris Maloney ◽  
Zac Levinson ◽  
Joost Bekaert ◽  
Alessandro Vaglio Pret ◽  
...  
Keyword(s):  
Pupil Plane ◽  
Mask Roughness

EUV mask roughness can recover litho-tool aberrations (Conference Presentation)

2017 ◽  
Author(s):  
Aamod Shanker ◽  
Laura Waller ◽  
Antoine Wojdyla ◽  
Markus P. Benk ◽  
Kenneth A. Goldberg ◽  
...  
Keyword(s):  
Mask Roughness

Field-varying aberration recovery in EUV microscopy using mask roughness

2018 ◽  
Author(s):  
Gautam Gunjala ◽  
Antoine Wojdyla ◽  
Aamod Shanker ◽  
Stuart Sherwin ◽  
Markus P. Benk ◽  
...  
Keyword(s):  
Mask Roughness
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