Mask roughness induced LER: geometric model at long correlation lengths
2000 ◽
Vol 10
(PR5)
◽
pp. Pr5-17-Pr5-17
Keyword(s):
Keyword(s):
Keyword(s):
2015 ◽
Vol 741
◽
pp. 133-137
2021 ◽
Vol 16
(4)
◽
pp. 597-607
Keyword(s):