A novel defect detection optical system using 199-nm light source for EUVL mask

Author(s):  
Ryoichi Hirano ◽  
Nobutaka Kikuiri ◽  
Masatoshi Hirono ◽  
Riki Ogawa ◽  
Hiroyuki Sigemura ◽  
...  
2009 ◽  
Vol 16 (2) ◽  
pp. 299-306 ◽  
Author(s):  
Md. Monirul Haque ◽  
Hironari Yamada ◽  
Ahsa Moon ◽  
Mami Yamada

The performance of the far-infrared (FIR) beamline of the 6 MeV tabletop synchrotron light source MIRRORCLE-6FIR dedicated to far-infrared spectroscopy is presented. MIRRORCLE-6FIR is equipped with a perfectly circular optical system (PhSR) placed around the 1 m-long circumference electron orbit. To illustrate the facility of this light source, the FIR output as well as its spectra were measured. The optimum optical system was designed by using the ray-tracing simulation code ZEMAX. The measured FIR intensity with the PhSR in place is about five times higher than that without the PhSR, which is in good agreement with the simulation results. The MIRRORCLE-6FIR spectral flux is compared with a standard thermal source and is found to be 1000 times greater than that from a typical thermal source at ∼15 cm−1. It is also observed that the MIRRORCLE-6FIR radiation has a highly coherent nature. The broadband infrared allows the facility to reach the spectral range from 10 cm−1 to 100 cm−1. MIRRORCLE-6FIR, owing to a large beam current, the PhSR mirror system, a large dynamic aperture and small ring energy, can deliver a bright flux of photons in the FIR/THz region useful for broadband spectroscopy.


1979 ◽  
Vol 88 (6) ◽  
pp. 771-773 ◽  
Author(s):  
Benjamin Chen ◽  
Terry L. Fry ◽  
Newton D. Fischer

A new hand-held otoscope photographic system, convenient and suitable for clinical application, is introduced. This instrument allows clear otoscopic examination in stenotic or tortuous ear canals, and photographs the subject in one procedure. The instrument consists of a rodlens optical system, a fiberoptic light source, a camera, and exchangeable speculum and a strobe light. Color photographs of tympanic membranes and middle ear pathology are presented.


Micromachines ◽  
2021 ◽  
Vol 12 (11) ◽  
pp. 1375
Author(s):  
Junji Pu ◽  
Kai Zeng ◽  
Yulie Wu ◽  
Dingbang Xiao

In recent years, the optical accelerometer based on the optical trapping force effect has gradually attracted the attention of researchers for its high sensitivity and high measurement accuracy. However, due to its large size and the complexity of optical path adjustment, the optical force accelerometers reported are only suitable for the laboratory environment up to now. In this paper, a miniature optical force dual-axis accelerometer based on the miniature optical system and a particles cavity which is prepared by Micro-Electro-Mechanical Systems (MEMS) technology is proposed. The overall system of the miniature optical levitation including the miniature optical system and MEMS particles cavity is a cylindrical structure with a diameter of about 10 mm and a height of 33 mm (Φ 10 mm × 33 mm). Moreover, the size of this accelerometer is 200 mm × 100 mm × 100 mm. Due to the selected light source being a laser diode light source with elliptical distribution, it is sensitive to the external acceleration in both the long axis and the short axis. This accelerometer achieves a measurement range of ±0.17 g–±0.26 g and measurement resolution of 0.49 mg and 1.88 mg. The result shows that the short-term zero-bias stability of the two orthogonal axes of the optical force accelerometer is 4.4 mg and 9.2 mg, respectively. The main conclusion that can be drawn is that this optical force accelerometer could provide an effective solution for measuring acceleration with an optical force effect for compact engineering devices.


2017 ◽  
Vol 46 (7) ◽  
pp. 722002
Author(s):  
XU Da ◽  
ZHANG Guo-yu ◽  
SUN Gao-fei ◽  
ZHANG Yu ◽  
LEI Jie ◽  
...  

2018 ◽  
Vol 176 ◽  
pp. 02013
Author(s):  
Prane Mariel B. Ong ◽  
Tatsuo Shiina ◽  
Naohiro Manago ◽  
Hiroaki Kuze ◽  
Hiroki Senshu ◽  
...  

A compact LED lidar was constructed and fieldtested with the aim to observe the Mars’ dust devils. To be able to fit it on the Mars rover, a specialized Cassegrain telescope was designed to be within a 10 cm-cube, with a field of view of 3mrad. The transmitter has 385 nm LED light source with 3 cmϕ opening, 70mrad divergence, 0.75W (7.5nJ/10ns) pulse power, and 500 kHz repetition frequency. The configuration of the optical system is biaxial to easily configure the overlap between their optical axes.


1935 ◽  
Vol 12 (2) ◽  
pp. 261-264
Author(s):  
G. A. Woonton ◽  
F. W. Pye

In this paper is discussed a method of shadow recording for use with reflecting types of oscillographs which simplifies the methods of obtaining time and amplitude rulings on the record. The optical system is rendered portable by the use of a low-intensity light source, compensated by high transmission efficiency. Comparative records indicate that, when used in conjunction with bromide paper, this optical system is of value in recording sinusoidal currents whose frequencies are below 20 cycles per second or currents of complicated wave form whose fundamental frequency is well below 20 cycles per second. No data relative to records on moving film are reported.Mann (1), in discussing a new portable electrocardiograph, has referred to an optical system of this type. The authors believe that the present paper contains sufficient new information on the details of construction and operation of this optical system to make it of value.


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