Using transmission line theory to calculate equivalent refractive index of EUV mask multilayer structures for efficient scattering simulation by finite-difference time-domain method

2009 ◽  
Author(s):  
Yen-Min Lee ◽  
Jia-Han Li ◽  
Philip C. W. Ng ◽  
Ting-Han Pei ◽  
Fu-Min Wang ◽  
...  
Sign in / Sign up

Export Citation Format

Share Document