Efficient scattering simulations for equivalent extreme ultraviolet mask multilayer structures by modified transmission line theory and finite-difference time-domain method
2010 ◽
Vol 9
(4)
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pp. 043003
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2009 ◽
2001 ◽
Vol 85
(2)
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pp. 22-31
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2010 ◽
Vol 25
(4)
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pp. 045007
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2002 ◽
Vol 85
(8)
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pp. 1-10
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2003 ◽
Vol 16
(1)
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pp. 1-13
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2004 ◽
Vol 18
(4)
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pp. 437-454
2013 ◽
Vol 34
(12)
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pp. 2999-3005
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