Auto-focusing technology for photoelectric measurement system

2009 ◽  
Author(s):  
Tao Lei ◽  
Sihan Yang ◽  
Yong Zhang ◽  
Qinzhang Wu
1997 ◽  
Author(s):  
Gangqiang Huang ◽  
Jianqun Huang ◽  
Qingshan Han ◽  
Zhiyun Wang ◽  
Zhensheng Wei

2015 ◽  
Vol 764-765 ◽  
pp. 1324-1328
Author(s):  
Pen Han Chen ◽  
Chien Hung Liu ◽  
Yu Fen Chen ◽  
Hung Sheng Chiu ◽  
Yu Chi Liu

This paper integrated a laser triangulation probe with a two-dimensional image measurement system to measure the height of an object using the auto-focusing method. In the laser triangulation probe, the laser diode was used as the light source and one-dimensional position sensitive detector was adopted to receive the position of the laser spots to detect the height. The laser triangulation probe was used for small height measurement and the auto-focusing method was used for large height measurement. Two standard gauges with thicknesses of 8mm and 8.5mm were used to verify our proposed method. With height difference of 500μm, the experiment results showed the measuring error was within ±3μm and standard deviation was about 0.1μm.


AIP Advances ◽  
2020 ◽  
Vol 10 (1) ◽  
pp. 015203
Author(s):  
Ling Ma ◽  
Guan Lin ◽  
Fajie Duan

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