An auto-focusing measurement system with the piezoelectric translator

Author(s):  
Ji-Hua Zhang ◽  
Lilong Cai
2015 ◽  
Vol 764-765 ◽  
pp. 1324-1328
Author(s):  
Pen Han Chen ◽  
Chien Hung Liu ◽  
Yu Fen Chen ◽  
Hung Sheng Chiu ◽  
Yu Chi Liu

This paper integrated a laser triangulation probe with a two-dimensional image measurement system to measure the height of an object using the auto-focusing method. In the laser triangulation probe, the laser diode was used as the light source and one-dimensional position sensitive detector was adopted to receive the position of the laser spots to detect the height. The laser triangulation probe was used for small height measurement and the auto-focusing method was used for large height measurement. Two standard gauges with thicknesses of 8mm and 8.5mm were used to verify our proposed method. With height difference of 500μm, the experiment results showed the measuring error was within ±3μm and standard deviation was about 0.1μm.


2009 ◽  
Author(s):  
Tao Lei ◽  
Sihan Yang ◽  
Yong Zhang ◽  
Qinzhang Wu

1999 ◽  
Vol 09 (PR3) ◽  
pp. Pr3-649-Pr3-654 ◽  
Author(s):  
A. Kröger-Vodde ◽  
A. Holländer

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