Precise evaluation of zero-CTE temperature of EUVL-grade TiO 2 -SiO 2 ultra-low-expansion glass using the line-focus-beam ultrasonic material characterization system

2009 ◽  
Author(s):  
Jun-ichi Kushibiki ◽  
Mototaka Arakawa
Keyword(s):  
Material Characterization ◽  
Focus Beam ◽  
Precise Evaluation ◽  
Line Focus

Evaluation of SiO2 Thin films on piezoelectric substrates using line-focus-beam ultrasonic material characterization system

2019 ◽  
Vol 58 (SG) ◽  
pp. SGGA05 ◽  
Author(s):  
Ryota Suenaga ◽  
Masashi Suzuki ◽  
Shoji Kakio ◽  
Yuji Ohashi ◽  
Mototaka Arakawa ◽  
...  
Keyword(s):  
Thin Films ◽  
Material Characterization ◽  
Focus Beam ◽  
Line Focus

Material Characterization by Acoustic Microscope with Line-Focus Beam

1982 ◽  
pp. 101-111 ◽  
Author(s):  
Jun-ichi Kushibiki ◽  
Akira Ohkubo ◽  
Noriyoshi Chubachi
Keyword(s):  
Material Characterization ◽  
Focus Beam ◽  
Acoustic Microscope ◽  
Line Focus
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